The vacuum and oxidative pyrolysis of poly‐<i>p</i>‐xylylene

Jellinek, H. H. G.; Lipovac, S. N.

doi:10.1002/pol.1970.150080919

Cited by 16 publications

(3 citation statements)

References 13 publications

(3 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The bridged oxygen then breaks the aliphatic bond, thereby forming two lower molecular weight polymer chains end-capped with aldehyde groups. [9,10] The nanocomposite exposed to oxygen for 30 min at 200 C showed a promi- , and d-valerolactone (six-membered ring) 1735 cm ±1 . Adjacent conjugation of the carbonyl group lowers the stretch wavenumber.…”

mentioning

confidence: 99%

CVD of Nanoporous Silica

Senkevich¹

1999

Chem. Vap. Deposition

View full text Add to dashboard Cite

mentioning

confidence: 99%

CVD of Nanoporous Silica

Senkevich¹

1999

Chem. Vap. Deposition

View full text Add to dashboard Cite

“…Parylene (a trade name for poly( p -xylylene)-based polymers) is available as parylene-N, -C, -D, -AF4, and so forth, where all but the first are functionalized derivatives of poly( p -xylylene). Over the years, numerous scientific research studies have reported on paralyne films, including the morphology and crystal structure of films deposited at various substrate temperatures, − thermal properties, − poly( p -xylylene) properties as gas barriers, ,,− mechanical and electrical properties of the films, ,, mechanism of the polymerization process, ,− and various applications of the parylene polymers. − ,, …”

Section: Introductionmentioning

confidence: 99%

Chemical Vapor Jet Deposition of Parylene Polymer Films in Air

et al. 2015

View full text Add to dashboard Cite

Parylene films are commonly used as transparent, flexible coatings in electronic devices and biomedical applications, exhibiting barrier properties against corrosion, low dielectric constant, and moisture resistance. Reactive vapor deposition of parylene results in conformal coverage of features at room temperature, which is advantageous for passivating, for example, organic optoelectronic devices. Conventional parylene deposition methods, however, coat surfaces virtually indiscriminately and utilize separate chambers for vaporization, pyrolysis, and polymerization, resulting in a large footprint and limited processing integration ability, especially at a laboratory scale. Here, we demonstrate the vaporization and pyrolysis of the di-p-xylylene (parylene dimer) in a single compact nozzle, producing a jet of monomer that polymerizes into a film upon contact with the substrate at room temperature. A guard flow jet is employed to shield the reactive monomer molecules en route to the substrate, thereby enabling polymer deposition and patterning in ambient atmosphere. We present an analytical model predicting film growth rate as a function of process parameters (e.g., gas flow rate and source, pyrolysis & substrate temperatures). The effect of jet flow dynamics on film morphology is also discussed. A 100% increase in the lifetime of air-sensitive OLEDs is demonstrated upon encapsulation of the devices with parylene-N film deposited by this technique. Potential advantages of this approach include increased material utilization efficiency, localized conformal coating capabilities, and an apparatus that is compact, inexpensive, and does not require vacuum.

show abstract

“…The thermal decomposition of poly-p-xylylenes proceeds through random chain scissions of the ethylene bridges [1,2]. A subsequent depropagation reaction yields low-molecular weight polymers, while a simultaneous zip reaction forms hydrogen and leaves unsaturated bridges.…”

mentioning

confidence: 99%