The use of STADIUM statistical TCAD simulation methodology in industrial environments

The software program called STADIUM has been developed by researchers at Florida Institute of Technologj (Florida Tech) through funding from SEMATECH. The purpose of STADIUM is to facilitate the Statistical design and simulation of integrated circuit processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology and allows the estimation of the statistical response of the manufacturing environment. This paper presents some of the methodo~ogy and implementation details of STADIUM.The overall goal of the Florida Tech STADIUM project is to provide a software system to American electronics industry which will allow engineers to statistically simulate integrated circuit processes, devices and circuits. This system should be useful to both manufacturing and design engineers and should work with a wide variety of simulators. STADIUM employs a design of experiments statistical methodology which reduces the amount of simulation time required (relative 10 Monte Carlo methods) and provides an understanding of the relationship between circuit output parameters and manufacturing process variation. Therefore, STADIUM addresses the need for design for manufacturability as well as allowing design space exploration.

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Statistical IC process and product simulation using STADIUM

Means

Sanders

1994

Conference Record Southcon

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STADIUM: a new tool for design for manufacturability through the use of statistical simulation

Sanders

Means

Hess

Southcon/96 Conference Record

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Engineers have used simulation for product design for a number of years but only recently have tlie tools been in existence to aim new designs for manufacturability.This paper concentrates on coupling practical optimization techniques (based on a design of experiments methodology) to conventional simulators for the purpose of characterizing component and system performances in terms of manufacturing variables. This is accomplished with the aid of a software tool called STADIUM which will be described in detail in this paper.

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STADIUM CKT statistical simulation system

Sanders

Means

Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium

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The use of STADIUM statistical TCAD simulation methodology in industrial environments

Cited by 5 publications

References 3 publications

Statistical IC process and product simulation using STADIUM

Statistical IC process and product simulation using STADIUM

STADIUM: a new tool for design for manufacturability through the use of statistical simulation

STADIUM CKT statistical simulation system

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