The secondary electron emission yield for 24 solid elements excited by primary electrons in the range 250–5000 ev: a theory/experiment comparison

Walker, Christopher; El-Gomati, Mohamed; Assa’d, Ahmad M. D.; Zadražil, M.

doi:10.1002/sca.20124

Cited by 131 publications

(115 citation statements)

References 40 publications

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“…The maximum secondary yield, δ m , and the corresponding energy, E m , are given in Table II along with the results extracted from the SEY curve of Walker et al [17] and the Pt data of Lin and Joy database [14]. The value of E m extracted from the curve of Walker is approximate, as the maximum of the SEY curve is rather flat.…”

Section: Secondary Emission Yield: Experimental Results and Compamentioning

confidence: 97%

Secondary Electron Emission of Pt: Experimental Study and Comparison With Models in the Multipactor Energy Range

Bronchalo

Coves

Boria

et al. 2016

IEEE Trans. Electron Devices

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Abstract-Experimental data of secondary emission yield (SEY) and electron emission spectra of Pt under electron irradiation for normal incidence and primary energies lower than 1 keV are presented. Several relevant magnitudes, as total SEY, elastic backscattering probability, secondary emission spectrum (SES) and backscattering coefficient, are given for different primary energies. These magnitudes are compared with theoretical or semiempirical formulas commonly used in the related literature.

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Section: Secondary Emission Yield: Experimental Results and Compamentioning

confidence: 97%

Secondary Electron Emission of Pt: Experimental Study and Comparison With Models in the Multipactor Energy Range

Bronchalo

Coves

Boria

et al. 2016

IEEE Trans. Electron Devices

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“…[1][2][3]9,11,12,18,19) The mentioned alternative MC scheme to calculate the secondary electron yield, based on a continuous slowing down approximation, uses as input the electron stopping power of the material being considered. [6][7][8] The secondary electron yields calculated using the two approaches are very close. What is more, the two MC schemes give results in satisfactory agreement with the experiment.…”

Section: Introductionmentioning

confidence: 77%

“…The secondary electron yield is calculated, according to Dionne,4) Lin and Joy, 5) Yasuda et al, 6) and Walker et al, 7) assuming that (i) the number dn of secondary electrons generated along each step length ds, corresponding to the energy loss dE, is given by where ε s is the effective energy necessary to generate a single secondary electron and (ii) the probability P(z) that a secondary electron generated at depth z will reach the surface and will emerge from it follows the exponential decay law , ) ( …”

Section: Continuous Slowing Down Approximationmentioning

confidence: 99%

See 1 more Smart Citation

Comparison between Energy Straggling Strategy and Continuous Slowing Down Approximation in Monte Carlo Simulation of Secondary Electron Emission of Insulating Materials

Dapor

2011

Progress in Nuclear Science and Technology

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Secondary electrons are commonly used for imaging in scanning electron microscopes, with applications ranging from secondary electron doping contrast in p-n junctions, line-width measurement in critical-dimension scanning electron microscopy and dimensional parameters evaluation in the production of masks and wafers in the semiconductor industry, to the study of biological samples. This paper describes the secondary electron emission yield calculated using two different Monte Carlo approaches. In the first, based on the energy straggling strategy, one takes into account all the single energy losses suffered by each electron in the secondary electron cascade. This method has been demonstrated to be very accurate for the calculation of the secondary electron yield and of the secondary electron energy distribution as well. An alternative way to calculate the secondary electron yield is based on a continuous slowing down approximation and uses as input the electron stopping power of the material being considered. As this work demonstrates that the secondary electron yields calculated using the two approaches are very close and in agreement with the experiment, the much faster continuous slowing down approximation is recommended. On the other hand, if other physical quantities, such as the secondary electron distributions, are required, the energy straggling strategy should be preferred, even if it requires much longer CPU times, due to its stronger physical background.

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“…Refs. [28][29][30]). Although any calculation of the electron energy value, providing the maximum transmissivity over 100%, would suffer from the data uncertainty mentioned, the qualitative explanation of the effect is quite straightforward.…”

Section: Very Low Energy Scanning Electron Microscopy Of Free-standinmentioning

confidence: 99%

Very Low Energy Scanning Electron Microscopy of Free-Standing Ultrathin Films

et al. 2010

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Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic Instrument and methodology is presented for very low energy scanning transmission electron microscopy. The detector system provides simultaneous acquisitions of total reflected and transmitted electron fluxes. Introductory experiments incorporated examination of ultrathin foils of gold, carbon and graphene flakes. Extremely sensitive thickness contrast obtained at units of eV is demonstrated. The phenomenon of electron transmissivity apparently exceeding 100% owing to the contribution of secondary electrons released near to the exit surface is described and discussed.

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The secondary electron emission yield for 24 solid elements excited by primary electrons in the range 250–5000 ev: a theory/experiment comparison

Cited by 131 publications

References 40 publications

Secondary Electron Emission of Pt: Experimental Study and Comparison With Models in the Multipactor Energy Range

Secondary Electron Emission of Pt: Experimental Study and Comparison With Models in the Multipactor Energy Range

Comparison between Energy Straggling Strategy and Continuous Slowing Down Approximation in Monte Carlo Simulation of Secondary Electron Emission of Insulating Materials

Very Low Energy Scanning Electron Microscopy of Free-Standing Ultrathin Films

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