The Search for a Reliable MEMS Switch

Rebeiz, Gabriel M.; Patel, C.S.; Han, Seungoh; Ko, Chun-Hsu; Ho, Kin‐Yip

doi:10.1109/mmm.2012.2226540

Cited by 110 publications

(49 citation statements)

References 42 publications

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“…1 However, when the switch is applied with a large power signal or operated in a temperature-changing environment, thermal deformation happens to the electrodes of the switch, resulting in changes of pull-in voltage and the instability of RF characteristics. 2 In order to solve this problem, we need to leave a margin for the actuation voltage.…”

Section: Introductionmentioning

confidence: 99%

“…Working chronically under inappropriate actuation voltage would easily lead the switch to early-stage failure. 1 In recent years, some RF MEMS switches with temperature-stability have been designed. Some methods have been adopted to reduce the sensitivity to temperature, for example, using composite beam, optimising structure, and even employing new materials and so on.…”

Section: Introductionmentioning

confidence: 99%

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Design of DC-contact RF MEMS switch with temperature stability

Sun

Zhu

et al. 2015

AIP Advances

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Etching technique for ruthenium with a high etch rate and high selectivity using ozone gas In order to improve the temperature stability of DC-contact RF MEMS switch, a thermal buckle-beam structure is implemented. The stability of the switch pull-in voltage versus temperature is not only improved, but also the impact of stress and stress gradient on the drive voltage is suppressed. Test results show that the switch pull-in voltage is less sensitive to temperature between -20 • C and 100 • C. The variable rate of pull-in voltage to temperature is about -120 mV/ • C. The RF performance of the switch is stable, and the isolation is almost independent of temperature. After being annealed at 280 • C for 12 hours, our switch samples, which are suitable for packaging, have less than 1.5% change in the rate of pull-in voltage. C 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License. [http://dx Design of DC-contact RF MEMS switch with temperature stability

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design of DC-contact RF MEMS switch with temperature stability

Sun

Zhu

et al. 2015

AIP Advances

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“…The main application areas of RF-MEMS switches include defense systems, intelligent base-station antennas, satellite switching networks, and high power phased arrays [7]. Many companies, such as Radant MEMS, Teledyne Scientific, HRL, IBM, NXP, EPCOS, Teravicta, Omron, Toshiba, and Advantest, have put extensive effort on research of RF-MEMS switches since 1990s [7].…”

Section: Introduction Of Rf-mems Switchesmentioning

confidence: 99%

“…Many companies, such as Radant MEMS, Teledyne Scientific, HRL, IBM, NXP, EPCOS, Teravicta, Omron, Toshiba, and Advantest, have put extensive effort on research of RF-MEMS switches since 1990s [7]. However, only Radant [8] and Omron [9,10] successfully have RF-MEMS switch products on the market.…”

Section: Introduction Of Rf-mems Switchesmentioning

confidence: 99%

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Characterization and reliability studies towards piezoelectrically actuated RF-MEMS switches

Wang¹

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Radio Frequency Microelectromechanical Systems (RFMEMS)

Nordquist

Olsson

2014

Wiley Encyclopedia of Electrical and Electronics Engineering

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Radio frequency microelectromechanical system (RF MEMS) devices are microscale devices that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. These devices use their mechanical and electrical properties to perform a specific RF electrical function such as switching, transmission, or filtering. RF MEMS has been a popular area of research since the early 1990s, and within the last several years, the technology has matured sufficiently for commercialization and use in commercial market systems.

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The Search for a Reliable MEMS Switch

Cited by 110 publications

References 42 publications

Design of DC-contact RF MEMS switch with temperature stability

Design of DC-contact RF MEMS switch with temperature stability

Characterization and reliability studies towards piezoelectrically actuated RF-MEMS switches

Radio Frequency Microelectromechanical Systems (RFMEMS)

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