2001
DOI: 10.1557/proc-666-f3.24
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The Mechanical Reliability of Sputter-Coated Indium Tin Oxide Polyester Substrates for Flexible Display and Touchscreen Applications

Abstract: Indium tin oxide (ITO) films deposited on polyester substrates are a key material in the development of two exciting technologies, touchscreens and flexible liquid crystal displays. The new generation “plastic” displays and touchscreens must be flexible and robust, have excellent optical properties, and be inexpensive. We report on the mechanical and electrical reliability of ITO on a polyethylene terephthalate substrate (PET). We show that the mechanical behavior of the ITO film is dominated by the properties… Show more

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Cited by 22 publications
(9 citation statements)
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“…The crack density as a function of the applied tensile strain in Structures 1 to 3 is shown in Figure 3 In real applications of flexible electronics, the strain level should be less than that for the initiation of channel cracks in functional layers, and that strain level is always less than 3% in ITO-based electrodes. [15] Other than mechanical failure, conductive failure, defined as the dramatic increase in electrical resistance during deformation, is also employed to evaluate the electro-mechanical quality of electrodes in a more direct and effective way. Figure 3(b) plots the normalized change in electrical resistance as a function of the applied tensile strain.…”
Section: In Situ Sem Observation Of Channel Cracks In Ito Film Under mentioning
confidence: 99%
“…The crack density as a function of the applied tensile strain in Structures 1 to 3 is shown in Figure 3 In real applications of flexible electronics, the strain level should be less than that for the initiation of channel cracks in functional layers, and that strain level is always less than 3% in ITO-based electrodes. [15] Other than mechanical failure, conductive failure, defined as the dramatic increase in electrical resistance during deformation, is also employed to evaluate the electro-mechanical quality of electrodes in a more direct and effective way. Figure 3(b) plots the normalized change in electrical resistance as a function of the applied tensile strain.…”
Section: In Situ Sem Observation Of Channel Cracks In Ito Film Under mentioning
confidence: 99%
“…The hardness of the films is relevant to film strength, durability during handling, and potentially wear resistance in applications where the coating is exposed [11,36,37] . For comparison, the hardness of ITO is reported to be 6.5 GPa [9] .…”
Section: Compositionmentioning
confidence: 99%
“…The improvement of optical/electrical property after annealing could be explained as the result of interaction between crack growth and [33], [34]. Moreover, the reliability is an important issue for industrial products [35]- [37]. There were three reliability tests deployed for the fabricated TPF, including high-temperature storage (HTS, 80°C for 240 hrs.…”
Section: B Film Fabrication and Characterizationmentioning
confidence: 99%