The improved performance of GaAs micromachined power sensor microsystem

Lalinský, T.; Hašc̆ı́k, Š.; Mozolová, Ž.; Burian, E.; Držík, Milan

doi:10.1016/s0924-4247(99)00037-0

Cited by 32 publications

(17 citation statements)

References 9 publications

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“…The fabrication of the thermoelectric power sensor is divided into front side and back side processing based on a combination of surface and bulk micromachining of GaAs, which is compatible with GaAs MMIC process (Dehe et al 1996a(Dehe et al , 1996bLalinsky et al 1999) GaAs is chosen as the substrate material because of its lower thermal conductivity, higher saturation velocity and higher temperature (Shih and Blum 1972). The load resistor is made by using a lift-off process through depositing of a TaN layer with a square resistance of 25 X/ h. In order to realize the 50 X resistance values, two 100 X resistors are connected in parallel.…”

Section: Fabricationmentioning

confidence: 99%

A voltage source model on thermoelectric power sensor based on MEMS technology

Wang

Liao

2011

Microsyst Technol

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In order to achieve monolithic integration of thermoelectric power sensor and its amplification system and improve the measurement accuracy of microwave power, a voltage source model is researched in this paper. And the thermoelectric power sensor is designed and fabricated using MEMS technology and GaAs MMIC process. It is measured in the X-band (8-12 GHz) with the input power in 100 mW range. When the input microwave power is at 10, 50 and 100 mW, respectively, the frequency dependent coefficient k 1 is -0.073, -0.39 and -0.82 mV/ GHz, respectively. The sensitivity coefficient k 2 is 0.311, 0.303, 0.293, 0.284 and 0.279 mV/mW at 8, 9, 10, 11 and 12 GHz, respectively, and has an excellent linearity. Based on the voltage source model, the feedback coefficient of its amplification system is set to 0.0078 9 P in to compensate the loss power caused by frequency dependent characteristic. In addition to miniaturization and low cost, an advantage using this model is significantly improved measurement accuracy.

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Section: Fabricationmentioning

confidence: 99%

A voltage source model on thermoelectric power sensor based on MEMS technology

Wang

Liao

2011

Microsyst Technol

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“…20. Comprehensive thermo-mechanical characterization of the sensor was carried out [14,22,51]. As expected, the electro-thermal conversion efficiency of the sensor was improved substantially.…”

Section: Micromachined Thermal Convertersmentioning

confidence: 99%

“…Some of them are intended to help designers to collaborate or coordinate by sharing product information and manufacturing services through formal or informal interactions [8,26,51]. Others propose formalized frameworks that manage conflicts between design constraints and assist designers in making decisions [8,37,38,42].…”

Section: Collaborative Design For Memsmentioning

confidence: 99%

“…Manufacturing tools and services are encapsulated in the hypertext documents and distributed through servers using HTTP [51].…”

Section: Collaborative Design For Memsmentioning

confidence: 99%

“…17 have also been demonstrated [7,14,22,23,51]. To improve the electro-thermal conversion efficiency of the sensor, cantilevers with thickness 2 μm were used.…”

Section: Micromachined Thermal Convertersmentioning

confidence: 99%

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Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

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Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

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