Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Abstract

Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

Manufacturing process and material selection in concurrent collaborative design of MEMS devices

“…As stated above, one of the challenges of MEMS technology is that MEMS devices or systems design must be separated from the complexities of the fabrication sequence and packaging processes with consideration of different materials and processes. In our previous work [32][33][34][35][36][37], a knowledgeintensive methodology for design and simulation of MEMS devices was developed, and a Web-based knowledge intensive support framework was built up to support concurrent collaborative design of MEMS. In this concurrent collaborative design framework, an interface is designed to separate design from fabrication/packaging processes, which allows the designer to use process-independent design tools and methodologies [23,28].…”

“…These tools can add a new process or material to WebMEMS-MASS databases without any changes to the compiled code. JDBC (Java Database Connection) is chosen as the method for implementing remote vendors that access to content in databases [33][34][35][36][37]. A Java database system was developed by using a Microsoft Access database to store the detail information of processes and materials and a Java program to access the database through a JDBC connection.…”

“…WebMEMS-MASS is developed mainly for intelligent selection of MEMS manufacturing processes and materials. It has also been incorporated as a sub-system into a concurrent collaborative MEMS design system, WebMEMS-Designer [33][34][35][36][37], which is being developed. WebMEMS-Designer has a unique combination of manufacturing and CAD, which allows the incorporation of true process data into fabrication simulation.…”

“…The design and manufacturing (fabrication and packaging) of MEMS and microelectronic devices and systems need to improve considerably from their current primitive state [23]. The advanced simulation and modeling tools for MEMS design must provide an advisory service so as to help the designer select manufacturing processes and materials for MEMS devices [9,29,[32][33][34][35][36][37]. It is therefore significant to develop an efficient method and system in a computer-aided concurrent collaborative environment for designers to use at the early stages of MEMS design.…”

“…The availability of suitable design tools combined with computer networks to provide access to high performance workstations and local or remote supercomputer capability can radically alter this situation. The Internet-based WWW enables developers to provide intelligent knowledge services [10,[33][34][35][36][37]. Expert systems running on servers can support a large group of users who communicate with the system over the network, in which user interfaces based on Web protocols provide access to the knowledge servers for services.…”