Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices

Zha, Xuan F.

doi:10.1007/0-387-25786-1_1

Cited by 4 publications

(3 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Currently, the availability of thin-film materials for the design and implementation of MEMS devices is increasing, and the evaluation and selection of a specific material can seldom be decided based on the variables or parameters that relate directly to the best performance of the device [49]. For example, the size of a component, materials to be processed, and tolerance to dimensions are some of the factors that need to be considered [50]. Pratap and Arunkumar [49] emphasized three basic requirements for materials employed in MEMS construction: (1) compatibility with electronics micro-technologies;…”

Section: Materials Selection For Pm25 Mems Sensorsmentioning

confidence: 99%

“…According to Zha and Du [51], evaluating and selecting a suitable material for fabricating MEMS devices entails analyzing the alternatives versus criteria belonging to both economic-and technology-related aspects. However, selecting an appropriate process-material pair for manufacturing a MEMS device or component is not easy [50]. Nowadays, this kind of evaluation and selection process is usually using heuristics based on the process capabilities in the fabrication of the MEMS vendor.…”

Section: Materials Selection For Pm25 Mems Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods

et al. 2018

View full text Add to dashboard Cite

Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.

show abstract

Section: Materials Selection For Pm25 Mems Sensorsmentioning

confidence: 99%

Section: Materials Selection For Pm25 Mems Sensorsmentioning

confidence: 99%

Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods

et al. 2018

View full text Add to dashboard Cite

show abstract

“…The selection of the sensors fabrication process must consider several factors such as materials, operation principle, dimensions, operating environmental conditions, signal conditioning processes and sensing techniques [ 14 ]. The design rules of each fabrication process must be considered during the sensors design stage.…”

Section: Design and Fabricationmentioning

confidence: 99%

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Herrera-May

Soler-Balcazar

Vázquez-Leal

et al. 2016

Sensors

View full text Add to dashboard Cite

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).

show abstract

Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Zha

Toh

Mems/Nems

View full text Add to dashboard Cite

Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices

Cited by 4 publications

References 19 publications

Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods

Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Contact Info

Product

Resources

About