The electromechanical behavior of piezoelectric thin film composite diaphragms possessing in-plane stresses

Griffin, Benjamin A.; Williams, M. D.; Wang, G; Sankar, Bhavani V.; Cattafesta, Louis N.; Sheplak, Mark

doi:10.1088/1361-6439/aa62b3

Cited by 7 publications

(1 citation statement)

References 37 publications

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“…Small membranes are used in different applications (e.g. as sensor or part of MEMS) which during manufacturing acquire certain level of tension that deviates their expected behaviour form [23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Study of the Dynamic Behaviour of Circular Membranes with Low Tension

2019

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The dynamic behaviour of membranes has been widely studied by well-known authors for a long time. A clear distinction can be made between the behaviour of membranes without tension (plate case) and membranes subjected to large tension or pre-strain in their plane (membrane case). In classical theories, less attention has been paid to membranes subjected to a low level of tension, which solution is between both extreme cases. Recently, certain fields of research are demanding solutions for this intermediate behaviour. It is the case of membranes present in MEMS and sensor or the response of the tympanic membrane in mammals hearing system. In this paper, the behaviour of plates and circular membranes with boundary conditions clamped in the edges has been studied. The natural frequencies for both cases (plate and membrane) have been calculated using the solutions of the traditional theories and these have been compared with the numerical frequencies calculated by finite element analysis. The dynamic response of membrane with low tension, corresponding to a transition between these extreme behaviours, has also been calculated. A theoretical solution has been used complemented with a wide set of numerical finite elements calculations. The analytical and numerical solutions are very close, being the error made using both methods very low; nevertheless, there are no analytical solutions for the entire transition zone between the plate and membrane behaviour. Therefore, this range has been completed using finite element analysis. Broad ranges of geometric configurations have been studied. The transition behaviour of the membrane has been clearly identified. The main practical consequences of these results have been discussed, in particular focused on the response of the tympanic membrane.

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Section: Introductionmentioning

confidence: 99%

Study of the Dynamic Behaviour of Circular Membranes with Low Tension

2019

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Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application

Kumar

Varghese

Sharma

et al. 2023

Micro and Nanostructures

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Investigation of film bulk acoustic resonators for sensing applications in liquid environment

Zhou

Zou

Gao

et al. 2022

Applied Physics Letters

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The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate the potential of FBAR devices working as the liquid sensors, we study the operating law of FBAR in liquid environments and explore the different loading effects of liquid on the shear mode and longitudinal mode. By analyzing the device and liquid interactions, we modify the Mason model of FBAR in the liquid environment. Subsequently, the influence of the piezoelectric film with different tilt angles and liquids on the characteristics of FBAR is discussed. We also prepared Sc0.2Al0.8N film-based FBAR to confirm the influence of different liquid environments on the resonant performances. The results show that the frequency drift of FBAR in the shear mode is related to density and viscosity of liquid, and the frequency drift of FBAR in the longitudinal mode is related to bulk modulus and density of liquid. The resonant frequency of FBAR in the shear mode is more sensitive with glycerol solution than that of FBAR in the longitudinal mode. This work can provide a research basis for the application of FBAR liquid sensors.

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The electromechanical behavior of piezoelectric thin film composite diaphragms possessing in-plane stresses

Cited by 7 publications

References 37 publications

Study of the Dynamic Behaviour of Circular Membranes with Low Tension

Study of the Dynamic Behaviour of Circular Membranes with Low Tension

Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application

Investigation of film bulk acoustic resonators for sensing applications in liquid environment

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