Piezoelectric composite diaphragms are widely used in MEMS, with reported applications in energy harvesters [1], accelerometers [2, 3], micropumps [4, 5] piezoelectric micromachined ultrasonic transducers (PMUTs) [6-9] and microphones [10-16]. Rectangular [4, 8, 10-12] or circular diaphragm [1-3, 6, 7, 9, 13-16] constructions are common, and depending on their application can have uniform or non-uniform layer compositions. In circular unimorph (one piezoelectric layer) and bimorph (two piezoelectric layers) geometries, the piezoelectric layers and/or electrodes often do
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