Abstract:The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate the potential of FBAR devices working as the liquid sensors, we study the operating law of FBAR in liquid environments and explore the different loading effects of liquid on the shear mode and longitudinal mode. By analyzing the device and liquid interactions, we modify the Mason model of FBAR in the liquid environment. Subsequently, the influence of th… Show more
“…Figure 2(h) shows the optical view of Ghz FBAR fabricated for this work.Figure 2.The main process for the fabrication and structure of Sc 0.2 Al 0.8 N-based FBAR device. 36,37 (a) Etched silicon substrate. (b) Filled the layer with SiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…The main process for the fabrication and structure of Sc 0.2 Al 0.8 N-based FBAR device. 36,37 (a) Etched silicon substrate. (b) Filled the layer with SiO 2 .…”
Sonodynamic therapy (SDT) is an emerging cancer treatment method in recent years. However, the ultrasound signal utilized for SDT is usually located at a low-frequency spectrum (<2 MHz), and in the field of SDT research, few studies have focused on the exploration and development of ultrasound frequency. Studies have shown that the GHz-level ultrasound can increase cell membrane permeability and have a negligible effect on cell vitality. Herein, we reported the study of a GHz thin film bulk acoustic resonator as an ultrasound source for synergistic treatment with nanoscale calcium peroxide (CaO2). It was discovered that this ultrasound source ultimately achieved an efficient therapeutic outcome on mouse breast cancer cell line 4T1. Such GHz-level ultrasound application in SDT is of high significance to broaden the cognition and application scope of SDT.
“…Figure 2(h) shows the optical view of Ghz FBAR fabricated for this work.Figure 2.The main process for the fabrication and structure of Sc 0.2 Al 0.8 N-based FBAR device. 36,37 (a) Etched silicon substrate. (b) Filled the layer with SiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…The main process for the fabrication and structure of Sc 0.2 Al 0.8 N-based FBAR device. 36,37 (a) Etched silicon substrate. (b) Filled the layer with SiO 2 .…”
Sonodynamic therapy (SDT) is an emerging cancer treatment method in recent years. However, the ultrasound signal utilized for SDT is usually located at a low-frequency spectrum (<2 MHz), and in the field of SDT research, few studies have focused on the exploration and development of ultrasound frequency. Studies have shown that the GHz-level ultrasound can increase cell membrane permeability and have a negligible effect on cell vitality. Herein, we reported the study of a GHz thin film bulk acoustic resonator as an ultrasound source for synergistic treatment with nanoscale calcium peroxide (CaO2). It was discovered that this ultrasound source ultimately achieved an efficient therapeutic outcome on mouse breast cancer cell line 4T1. Such GHz-level ultrasound application in SDT is of high significance to broaden the cognition and application scope of SDT.
“…Sensors based on piezoelectric bulk acoustic resonators have been widely used in gas and liquid-phase sensing in recent years [ 1 , 2 , 3 , 4 ]. Traditional piezoelectric resonators usually are based on thickness-field-excitation (TFE) mode (the electrodes are located on the upper and lower surfaces of the resonator) [ 5 , 6 , 7 , 8 ]. In recent years, the lateral-field-excitation (LFE) mode (electrodes are distributed on the same surface of the piezoelectric plate) has been developed [ 9 , 10 , 11 ].…”
The relaxor ferroelectric single crystal (1−x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) has high piezoelectric constants, and thus has a good application prospect in the field of highly sensitive piezoelectric sensors. In this paper, for relaxor ferroelectric single crystal PMN-PT, the bulk acoustic wave characteristics on pure- and pseudo-lateral-field-excitation (pure- and pseudo-LFE) modes are investigated. LFE piezoelectric coupling coefficients and acoustic wave phase velocities for PMN-PT crystals in different cuts and electric field directions are calculated. On this basis, the optimal cuts of pure-LFE and pseudo-LFE modes of relaxor ferroelectric single crystal PMN-PT are obtained, namely, (zxt)45° and (zxtl)90°/90°, respectively. Finally, finite element simulations are carried out to verify the cuts of pure-LFE and pseudo-LFE modes. The simulation results show that the PMN-PT acoustic wave devices in pure-LFE mode have good energy-trapping effects. For PMN-PT acoustic wave devices in pseudo-LFE mode, when the device is in air, no obvious energy-trapping emerges; when the water (as a virtual electrode) is added to the surface of the crystal plate, an obvious resonance peak and the energy-trapping effect appears. Therefore, the PMN-PT pure-LFE device is suitable for gas-phase detections. While the PMN-PT pseudo-LFE device is suitable for liquid-phase detections. The above results verify the correctness of the cuts of the two modes. The research results provide an important basis for the development of highly sensitive LFE piezoelectric sensors based on relaxor ferroelectric single crystal PMN-PT.
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