The electrochemical deposition of silicon - carbon thin films from organic solution

Grigoryev, Mikhail N.; Myasoedova, Tatiana N.; Mikhailova, T. S.

doi:10.1088/1742-6596/1124/8/081043

Cited by 8 publications

(4 citation statements)

References 10 publications

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“…An electrolytic deposition system was used to obtain silicon-carbon films. It was substantiated and shown in [25]. The substrates were mounted on the negative electrode.…”

Section: Fabrication Of the Silicon-carbon Filmmentioning

confidence: 95%

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

et al. 2019

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In this study, we designed two types of gas-sensor chips with silicon–carbon film, doped with CuO, as the sensitive layer. The first type of gas-sensor chip consists of an Al2O3 substrate with a conductive chromium sublayer of ~10 nm thickness and 200 Ω/□ surface resistance, deposited by magnetron sputtering. The second type was fabricated via the electrochemical deposition of a silicon–carbon film onto a dielectric substrate with copper electrodes formed by photoelectrochemical etching. The gas sensors are sensitive to the presence of CO and CH4 impurities in the air at operating temperatures above 150 °C, and demonstrated p- (type-1) and n-type (type-2) conductivity. The type-1 gas sensor showed fast response and recovery time but low sensitivity, while the type-2 sensor was characterized by high sensitivity but longer response and recovery time. The silicon–carbon films were characterized by the presence of the hexagonal 6H SiC polytype with the impurities of the rhombohedral 15 R SiC phase. XRD analysis revealed the presence of a CuO phase.

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“…An electrolytic deposition system was used to obtain silicon-carbon films. It was substantiated and shown in [25]. The substrates were mounted on the negative electrode.…”

Section: Fabrication Of the Silicon-carbon Filmmentioning

confidence: 95%

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

et al. 2019

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“…To obtain SiC films, ion sputtering, electrochemical deposition from molten salt, and the sol–gel method are also used. 19 These methods are not used as often due to the complexity of the experiment, including high vacuum and high temperature. However, the liquid deposition method has a number of advantages, such as the availability for large area deposition on intricate surfaces, low power consumption, and ease of setup compared to vapor deposition methods.…”

Section: Introductionmentioning

confidence: 99%

Computer simulation of obtaining thin films of silicon carbide

Галашев

Abramova

2023

Phys. Chem. Chem. Phys.

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“…There are some reports that have demonstrated the possibility of the electrochemical deposition of DLC films from the organic liquids such as methanol [12], acetonitrile [13], dimethylsulfoxide [14], and lithium acetylide in dimethylsulfoxide [15], in ambient conditions. However, earlier, we reported the electrochemical deposition of silicon-carbon films from methanol/ethanol and hexamethyldisilazane (HMDS) solution [16,17]. However, in the development of the synthesis of a new material, the deposition kinetics is one of the first components to be studied in detail to ensure reproducibility.…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Deposition of Silicon-Carbon Films: A Study on the Nucleation and Growth Mechanism

et al. 2019

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Silicon-carbon films have been deposited on silicon and Al2O3/Cr-Cu substrates, making use of the electrolysis of methanol/dimethylformamide-hexamethyldisilazane (HMDS) solutions. The electrodeposited films were characterized by Raman spectroscopy and scanning electron microscopy, respectively. Moreover, the nucleation and growth mechanism of the films were studied from the experimental current transients.

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The electrochemical deposition of silicon - carbon thin films from organic solution

Cited by 8 publications

References 10 publications

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

Computer simulation of obtaining thin films of silicon carbide

Electrochemical Deposition of Silicon-Carbon Films: A Study on the Nucleation and Growth Mechanism

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