The effect of grain size on viscoelastic relaxation behavior of Au thin films

Mongkolsuttirat, Kittisun; Smyth, J. R.; Brown, W. L.; Vinci, Richard P.

doi:10.1016/j.scriptamat.2018.06.003

Cited by 8 publications

(5 citation statements)

References 13 publications

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“…When the dimensions of a sample decrease to the same order of the grain size, size effects set up. In thin polycrystalline metal foils mechanical strength is significantly dependent on foil thickness and grain size, in particular yield stress increases as foil thickness decreases owing to constrained dislocation dynamics [27,28].…”

Section: Thin Al Foils For Memsmentioning

confidence: 99%

Mechanical Spectroscopy Investigation of Defective Structures in Metals

Fava,

Montanari,

Richetta

et al. 2023

KEM

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Mechanical spectroscopy (MS) is a dynamic technique for the characterization of material properties providing information that can not be obtained otherwise, and is important for a variety of engineering fields. To illustrate the potentiality of MS, this work provides some examples regarding different metallic systems: (i) thin Al foils for MEMS, (ii) complex structures of point defects in Cr martensitic steels for structural applications in future nuclear fusion reactors, (iii) depinning of dislocations from point defects and precipitates.

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Section: Thin Al Foils For Memsmentioning

confidence: 99%

Mechanical Spectroscopy Investigation of Defective Structures in Metals

Fava,

Montanari,

Richetta

et al. 2023

KEM

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“…1,2 In thin metal foils, the mechanical properties significantly depend on foil thickness and grain size 3 ; in particular, yield stress is rising as the foil thickness decreases, and such behavior has been ascribed to constrained dislocation dynamics. 4,5 The quasistatic response of thin foils to external applied stresses has been investigated through microtensile, wafer curvature, 6 microbeam bending, 7 nanoindentation, 8 and bulge tests, 9 while their dynamic behaviorthrough mechanical spectroscopy (MS) tests. [9][10][11][12][13] MS tests are carried out by exciting a material through a periodic stress σ and the occurrence of anelastic phenomena leads to out-of-phase periodic strain ε;…”

Section: Introductionmentioning

confidence: 99%

XPS investigation of 5N purity Al thin foils for MEMS devices

Bolli

Kačiulis²,

Mezzi³

et al. 2022

Surface & Interface Analysis

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Thin Al foils are promising materials for applications in devices of microelectromechanical systems (MEMS). In this work, three foils of high purity (5N) Al with different thickness (10, 50, and 125 μm) were analyzed by means of X‐ray photoelectron spectroscopy (XPS), before and after annealing (720 K for 30 min). XPS surface analysis and depth profiling of chemical composition were performed to investigate the distribution of Al oxide. Electron energy loss spectroscopy (EELS) measurements were also carried out in order to identify the plasmon losses and chemical state of Al. The loss peaks in the 5N‐Al thin foils were compared with those of an Al foil of commercial purity (99.95 wt%). The thickness of the oxide layer on the sample surface of all the samples is not constant and oxide is thicker in the samples of high purity than in those of commercial quality. Moreover, the thinnest foils of 5N‐Al (10 μm) exhibit the thinnest oxide layer. These findings have been discussed by considering the size effect, that is, mechanical properties of thin foils are improving as the thickness decreases. The complex morphology of the metal‐oxide interface may contribute to enhance the mechanical performances of Al foils with a thickness below ~50 μm, because the free dislocations pile up against the interface which represents an obstacle for their motion hindering plastic deformation. Obtained results suggest that Al foils to be used in MEMS devices should be of high purity and annealed to get a surface completely covered by the oxide layer.

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“…MEMS devices are electrically controlled, but they are susceptible to mechanical failure and damping due to internal friction that is created by the impact between thin metal films on dynamic loads. At a micrometer scale or nanometer scale, measuring the internal friction of a thin film could help to determine the relaxation processes involved in boundary diffusion and sliding [ 5 , 6 , 7 ]. Prieler et al [ 8 ] and Illés et al [ 9 ] performed systematic investigations of the relaxation of thin Al films on a Si substrate, in which the grain size was completely controlled and varied solely with film thickness [ 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

et al. 2021

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Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.

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The effect of grain size on viscoelastic relaxation behavior of Au thin films

Cited by 8 publications

References 13 publications

Mechanical Spectroscopy Investigation of Defective Structures in Metals

Mechanical Spectroscopy Investigation of Defective Structures in Metals

XPS investigation of 5N purity Al thin foils for MEMS devices

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

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