Scanning X-ray microdiffraction (microSXRD) combines the use of high-brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large-area two-dimensional-detector technology. Using white beams or a combination of white and monochromatic beams, this technique allows for the orientation and strain/stress mapping of polycrystalline thin films with submicrometer spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micrometer) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the microSXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements.
Near-edge and extended x-ray-absorption fine-structure measurements from a wide variety of oxidized Si nanocrystals and H-passivated porous Si samples, combined with electron microscopy, ir absorption, forward recoil scattering, and luminescence emission data, provide a consistent structural picture of the species responsible for the luminescence observed in these systems. For porous Si samples whose luminescence wavelengths peak in the visible region, i.e. , at (700 nm, their mass-weighted-average structures are determined here to be particles (not wires) whose short-range character is crystalline and 0 whose dimensionstypically (15 Aare significantly smaller than previously reported or proposed.Results are also presented which demonstrate that the observed visible luminescence is not related to either a photo-oxidized Si species in porous Si or an interfacial suboxide species in the Si nanocrystals. The structural and compositional findings reported here depend only on sample luminescence behavior, not on how the luminescent particles are produced, and thus have general implications in assigning quantum confinement as the mechanism responsible for the visible luminescence observed in both nanocrystalline and porous silicon.
We have investigated the fundamental mechanism underlying the hydrogen-induced exfoliation of silicon, using a combination of spectroscopic and microscopic techniques. We have studied the evolution of the internal defect structure as a function of implanted hydrogen concentration and annealing temperature and found that the mechanism consists of a number of essential components in which hydrogen plays a key role. Specifically, we show that the chemical action of hydrogen leads to the formation of (100) and (111) internal surfaces above 400 °C via agglomeration of the initial defect structure. In addition, molecular hydrogen is evolved between 200 and 400 °C and subsequently traps in the microvoids bounded by the internal surfaces, resulting in the build-up of internal pressure. This, in turn, leads to the observed “blistering” of unconstrained silicon samples, or complete layer transfer for silicon wafers joined to a supporting (handle) wafer which acts as a mechanical “stiffener.”
The Panel was charged with assessing the present scientific understanding of the size-dependent physical and chemical properties of clusters, the methods of synthesis of macroscopic amounts of size-selected clusters with desired properties, and most importantly, the possibility of their controlled assembly into new materials with novel properties. The Panel was composed of both academic and industrial scientists from the physics, chemistry, and materials science communities, and met in January 1988.In materials (insulators, semiconductors, and metals) with strong chemical bonding, there is extensive spatial delocalization of valence electrons, and therefore the bulk physical properties which depend upon these electrons develop only gradually with cluster size. Recent research using supersonic-jet, gas-aggregation, colloidal, and chemical-synthetic methods indeed clearly establishes that intermediate size clusters have novel and hybrid properties, between the molecular and bulk solid-state limits. A scientific understanding of these transitions in properties has only been partially achieved, and the Panel believes that this interdisciplinary area of science is at the very heart of the basic nature of materials. In Sec. V (Future Challenges and Opportunities), a series of basic questions for future research are detailed. Each question has an obvious impact on our potential ability to create new materials.Present methods for the synthesis of useful amounts of size-selected clusters, with surface chemical properties purposefully controlled and/or modified, are almost nonexistent, and these fundamentally limit our ability to explore the assembly of clusters into potentially novel materials. While elegant spectroscopic and chemisorption studies of size-selected clusters have been carried out using molecular-beam technologies, there are no demonstrated methods for recovery and accumulation of such samples. Within the past year, the first reports of the chemical synthesis of clusters with surfaces chemically modified have been reported for limited classes of materials. Apparatus for the accumulation and consolidation of nanophase materials have been developed, and the first promising studies of their physical properties are appearing. In both the chemical and nanophase synthesis areas, clusters with a distribution of sizes and shapes are being studied. Progress on macroscopic synthetic methods for size-selected clusters of controlled surface properties is the most important immediate goal recognized by the Panel. Simultaneous improvement in physical characterization will be necessary to guide synthesis research.Assuming such progress will occur, the Panel suggests that self-assembly of clusters into new elemental polymorphs and new types of nanoscale heterogeneous materials offers an area of intriguing technological promise. The electrical and optical properties of such heterogeneous materials could be tailored in very specific ways. Such ideas are quite speculative at this time; their implementation critically depends upon controlled modification of cluster surfaces, and upon development of characterization and theoretical tools to guide experiments.The Panel concluded that a number of genuinely novel ideas had been enunciated, and that in its opinion some would surely lead to exciting new science and important new materials.
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