The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

Alcock, Simon G.; Sawhney, Kawal; Scott, Stewart M.; Pedersen, U.; Walton, Robert; Siewert, Frank; Zeschke, Thomas; Senf, F.; Noll, T.; Lammert, Heiner

doi:10.1016/j.nima.2009.10.137

Cited by 153 publications

(80 citation statements)

References 6 publications

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“…The internal cooling has the additional advantage that no external cooling brackets deform this 450 mm long mirror. Fully clamped into its opto-mechanical holder, using metrology feedback from the Diamond-NOM slope profilometer, 12 the mirror has a radius >240 km and deviations of 0.16 µrad (RMS) along the tangential direction. The last optical elements where the heat load is of concern are the gratings; even with their cooling brackets attached the slope errors of these are kept below 0.25 µrad.…”

Section: Monochromator and Refocussing Optics Designmentioning

confidence: 99%

A facility for the analysis of the electronic structures of solids and their surfaces by synchrotron radiation photoelectron spectroscopy

Hoesch

Kim

Dudin

et al. 2017

Review of Scientific Instruments

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129

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A synchrotron radiation beamline in the photon energy range of 18 -240 eV and an electron spectroscopy end station have been constructed at the 3 GeV Diamond Light Source storage ring. The instrument features a variable polarisation undulator, a high resolution monochromator, a re-focussing system to form a beam spot of 50x50 µm 2 and an end station for angle-resolved photoelectron spectroscopy (ARPES) including a 6-degrees-of-freedom cryogenic sample manipulator. The beamline design and its performance allow for a highly productive and precise use of the ARPES technique at an energy resolution of 10 -15 meV for fast k-space mapping studies with a photon flux up to 2 • 10 13 ph/sec and well below 3 meV for high resolution spectra.

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Section: Monochromator and Refocussing Optics Designmentioning

confidence: 99%

A facility for the analysis of the electronic structures of solids and their surfaces by synchrotron radiation photoelectron spectroscopy

Hoesch

Kim

Dudin

et al. 2017

Review of Scientific Instruments

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129

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“…12,27,[37][38][39][40][41] This can be thought of as a repeatability ( Below we describe a custom-made tilt stage Model N-310K021 designed and manufactured at Physik…”

Section: Design and Compliance Tests Of A Tilt Stage For A Utm Smentioning

confidence: 99%

High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Yashchuk

Artemiev

Centers

et al. 2016

Review of Scientific Instruments

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The ultimate performance of surface slope metrology instrumentation, such as long trace profilers and autocollimator based deflectometers, is limited by systematic errors that are increased when the entire angular range is used for metrology of significantly curved optics. At the ALS X-Ray Optics Laboratory, in collaboration with the HZB/BESSY-II and PTB (Germany) metrology teams, we are working on a calibration method for deflectometers, based on a concept of a universal test mirror (UTM) [Proc. SPIE 6704, 67040A (2007)]. Potentially, the UTM method provides high performance calibration, and accounts for peculiarities of the optics under test (e.g., slope distribution) and the experimental arrangement (e.g., the distance between the sensor and the optic under test). At the same time, the UTM calibration method is inherently universal, applicable to a variety of optics and experimental arrangements. In this work we present the results of tests with a key component of the UTM system, a custom high precision tilt stage, which has been recently developed in collaboration with Physik Instrumente, a Author to whom correspondence should be addressed. Electronic mail: VVYashchuk@lbl.gov. 2GmbH. The tests have demonstrated high performance of the stage and its capability (after additional calibration) to provide angular calibration of surface slope measuring profilers over the entire instrumental dynamic range with absolute accuracy better than 30 nrad. The details of the stage design and tests are presented. We also discuss the foundation of the UTM method and calibration algorithm, as well as the possible design of a full scale UTM system.

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“…Both instruments operate in a scanning penta-prism mode without the need to use a reference beam to correct for slide pitch error. A similar and improved Diamond-NOM has also been developed (Alcock et al, 2010).]. A new Traceable Multiple Sensor (TMS) system was developed by the PhysikalischTechnische Bundesanstalt (PTB) for measurement with nanometer accuracy (Fig.…”

Section: Various Nano-accuracy Profilers With Scanning Pencil Beam Mementioning

confidence: 99%

Nano-Accuracy Surface Figure Metrology of Precision Optics

Qian¹,

Takacs²

2012

Modern Metrology Concerns

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The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

Cited by 153 publications

References 6 publications

A facility for the analysis of the electronic structures of solids and their surfaces by synchrotron radiation photoelectron spectroscopy

A facility for the analysis of the electronic structures of solids and their surfaces by synchrotron radiation photoelectron spectroscopy

High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Nano-Accuracy Surface Figure Metrology of Precision Optics

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