High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Centers, Gary P.; Chaubard, Arthur; Geckeler, Ralf D.; Lacey, Ian; Marth, H.; McKinney, Wayne R.; Noll, T.; Siewert, Frank; Winter, Mathias; Zeschke, Thomas

doi:10.1063/1.4950729

Cited by 17 publications

(32 citation statements)

References 43 publications

(47 reference statements)

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“…74 Recently, a keystone of the UTM system, a custom high-precision tilting stage, has been purchased and tested. 75 The tests were based on a comparison of calibrations of the AC, obtained with the UTM tilting stage, with the calibration, performed at the PTB using the high-precision angular comparator. 29,30 The tests have demonstrated agreement of the calibrations on the level better than 30 nrad (rms).…”

Section: Discussionmentioning

confidence: 99%

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Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

et al. 2015

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Abstract. The advent of fully coherent free-electron laser and diffraction-limited synchrotron radiation storage ring sources of x-rays is catalyzing the development of new ultrahigh accuracy metrology methods. To fully exploit these sources, metrology needs to be capable of determining the figure of an optical element with subnanometer height accuracy. The major limiting factors of the current absolute accuracy of ex situ metrology are drift errors due to temporal instabilities of the lab's environmental conditions and systematic errors inherent to the metrology instruments. Here, we discuss in detail work at the Advanced Light Source X-Ray Optics Laboratory on building of advanced environmental control that is a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics. By a few examples, we show how the improvement of the environmental conditions in the lab allows us to significantly gain efficiency in performing ex situ metrology with high-quality x-ray mirrors. The developed concepts and approaches, included in the design of the new X-Ray Optics Laboratory, are described in detail. These data are essential for construction and successful operation of a modern metrology facility for x-ray optics, as well as high-precision measurements in many fields of experimental physics. © The Authors. Published by SPIE under a Creative CommonsAttribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requiresfull attribution of the original publication, including its DOI.

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Section: Discussionmentioning

confidence: 99%

“…29,30 The tests have demonstrated agreement of the calibrations on the level better than 30 nrad (rms). 75 The work on development of a full-scale UTM system is in progress.…”

Section: Discussionmentioning

confidence: 99%

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

et al. 2015

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“…3) is a precision calibration-tilting-stage (CTS in Fig. 1) [59], designed and fabricated as a key element of the universal test mirror (UTM) system [60].…”

Section: Experimental Set-up Of the Als Osmsmentioning

confidence: 99%

“…Figure 2 shows the in-situ calibration system, integrated to the OSMS for calibration of the sample-arm AC. The system is based on an AC ELCOMAT-3000 (AC-3 in Figs [59], and (b) the enlarged view of the tilt stage with two reference mirrors, M˗1 and M˗2, and the end parts of aperture tubes attached to the reference AC (AC-3) and the AC in the OSMS sample arm (AC-1).…”

Section: Experimental Set-up Of the Als Osmsmentioning

confidence: 99%

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Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Lacey

Anderson

Dickert

et al. 2019

Advances in Metrology for X-Ray and EUV Optics VIII

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X-ray optics, desired for beamlines at free-electron-laser and diffraction-limited-storage-ring x-ray light sources, must have almost perfect surfaces, capable of delivering light to experiments without significant degradation of brightness and coherence. To accurately characterize such optics at an optical metrology lab, two basic types of surface slope profilometers are used: the long trace profilers (LTPs) and nanometer optical measuring (NOM) like angular deflectometers, based on electronic autocollimator (AC) ELCOMAT-3000. The inherent systematic errors of the instrument's optical sensors set the principle limit to their measuring performance. Where autocollimator of a NOM-like profiler may be calibrated at a unique dedicated facility, this is for a particular configuration of distance, aperture size, and angular range that does not always match the exact use in a scanning measurement with the profiler. Here we discuss the developed methodology, experimental setup , and numerical methods of transferring the calibration of one reference AC to the scanning AC of the Optical Surface Measuring System (OSMS), recently brought to operation at the ALS X˗Ray Optics Laboratory. We show that precision calibration of the OSMS performed in three steps, allows us to provide high confidence and accuracy low-spatial-frequency metrology and not 'print into' measurements the inherent systematic error of tool in use. With the examples of the OSMS measurements with a state-of-the-art x-ray aspherical mirror, available from one of the most advanced vendors of x˗ray optics, we demonstrate the high efficacy of the developed calibration procedure. The results of our work are important for obtaining high reliability data, needed for sophisticated numerical simulations of beamline performance and optimization of beamline usage of the optics.

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Environmental influences on autocollimator-based angle and form metrology

Geckeler

Křen

Just

et al. 2019

Review of Scientific Instruments

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Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 10 −4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. We also discuss the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. This work aims at approaching fundamental limits in autocollimator-based slope and form metrology.

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High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Cited by 17 publications

References 43 publications

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Environmental influences on autocollimator-based angle and form metrology

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