The Correlation between an Electric Field and the Metastable Chlorine Ion Density Distributions in an Ultrahigh-Frequency Plasma

Abstract

Impact ionization of the heavy-hole band by electrons in a degenerate p-type Kane semiconductor is studied theoretically under the condition that the hole temperature is much less than their Fermi energy. We take into consideration for the first time the fact that the valence band states that could be ionized in a non-degenerate material by an electron at the ionization threshold may be empty in a degenerate p-type semiconductor if the Fermi level lies deep enough in the valence band. Therefore the actual ionization threshold energy in this material depends on the Fermi level position. We found this dependence and calculated analytically the corresponding impact ionization probability as a function of the ionizing electron energy and the Fermi level position.

Investigation of Microwave Energy Distribution Character in a Resonator Type Plasmatron

“…As it is shown in [10], the character of particles ionization rate distribution in microwave discharge plasma closely correlates with the distribution of field in plasma. The concentration of active plasma particles is connected with the uniformity of treating the materials with plasma.…”

“…To study the microwave energy distribution in a plasma volume of a rectangular resonator we used the so called method of an "active probe", used in microwave devices for measuring the structure of electromagnetic field [12] and the intensity of the electromagnetic radiation [13]. This method also has been used in a number of investigations to measure electromagnetic fields in plasma chambers of plasmatrons with various designs of microwave applicators [10,14,15].…”

Investigation of Silicon Wafers’ Influence on the Local Microwave Power Values in a Resonator-Type Plasmatron

“…In a microwave discharge plasma, when the electrodynamic characteristics of a microwave applicator are changed, it is possible to control the internal discharge structure [6], which is impossible, for example, in a direct current discharge. From this point of view, volume resonators are perspective technical solutions for localization of microwave energy in a plasma volume.…”

Investigation of the Method of Dynamic Microwave Power Redistribution in a Resonator-Type Plasmatron

“…[1][2][3][4][5][6][7][8]. Such technological plasma-chemical installations are developed on the base of microwave cavity resonators with discharge vacuum chambers located in the center [9][10][11][12].…”

“…in microwave discharge plasma significantly correlate with the distribution of electromagnetic field in plasma. The concentration of active plasma particles, in its turn, is connected with the rate of plasma treatment processes of materials [9]. Depending on the process active plasma particles may be ions, radicals, atoms or etc.…”