Abstract:The article concerns the investigation results of the ø100 mm silicon wafers' influence on the microwave power value f<sub>MW</sub>=2.45 ± 0.05 GHz in local points on the axis of a reaction-discharge chamber with the volume of about 9000 cm<sup>3</sup> of a resonator-type plasmatron. The experiments were carried out in the conditions of the dynamic microwave power redistribution inside a volumetric resonator by using a moving dissector. To register microwave power in the plasma volume, … Show more
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