The contamination of surfaces during high-energy electron irradiation

Hart, R. K.; Kassner, T.F.; Maurin, Jan K.

doi:10.1080/14786437008238431

Cited by 51 publications

(23 citation statements)

References 6 publications

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“…6 Similar observations were reported by other researchers, and the sources of specimen contamination were investigated. [7][8][9][10][11][12] The contamination was believed to be the result of interaction between the electron beam and organic molecules adsorbed on the bombarded surface. Several models were proposed for the arrival of hydrocarbon molecules at the irradiated region.…”

Section: Mechanics Of Hydrogenated Amorphous Carbon Deposits From Elementioning

confidence: 99%

“…9 Later Hart et al showed that the surface migration of adsorbed gas to the irradiated area is an important contributor to deposited carbon. 12 Early research work on EBID focused on reducing its effect in contaminating the surface of the samples during electron microscopy studies. Later, EBID was used to produce electrically insulating thin films when silicone oil vapor was deliberately introduced, 13 to repair photomasks, 14 to fabricate conductive lines, 15,16 and to construct three-dimensional nanoscale structures.…”

Section: Mechanics Of Hydrogenated Amorphous Carbon Deposits From Elementioning

confidence: 99%

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Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Ding

Dikin

Chen

et al. 2005

Journal of Applied Physics

142

162

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Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition ͑EBID͒ has been used to deposit carbon films that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBID deposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBID deposit was found to be hydrogenated amorphous carbon ͑a-C:H͒ having more sp 2 -than sp 3 -bonded carbon. Nanoindentation tests revealed a hardness of ϳ4 GPa and an elastic modulus of 30-60 GPa, depending on the accelerating voltage. This reflects a relatively soft film, which is built out of precursor molecular ions impacting the growing surface layer with low energies. The use of such deposits as clamps for tensile tests of poly͑acrylonitrile͒-based carbon nanofibers loaded between opposing atomic force microscope cantilevers is presented as an example application

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Section: Mechanics Of Hydrogenated Amorphous Carbon Deposits From Elementioning

confidence: 99%

Section: Mechanics Of Hydrogenated Amorphous Carbon Deposits From Elementioning

confidence: 99%

Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Ding

Dikin

Chen

et al. 2005

Journal of Applied Physics

142

162

View full text Add to dashboard Cite

show abstract

“…However, the gain in contamination at low voltage does not balance the contamination reduction due to the decrease of current density connected with the voltage change (Fig. lb) [8,9]. In (b) shows that by increasing V by a factor of 2 (from 15 to 30 kV) the contamination decreases by about 57%, whereas the current density increases by a factor of 5, with a net gain in contamination by a factor of 2.5. and, in addition, a smaller cross-section at their base and a smaller apical angle, probably due to the smaller flanks of the beam cross-section than in the case of low voltage beams.…”

Section: Introductionmentioning

confidence: 95%

“…Since it is well known that the contamination rate C increases on decreasing the accelerating voltage V (C is proportional to V-0-8, Fig. la) [8,9] and is proportional to the current density J at specimen level, one would expect the best results are obtained at low voltages. However, the gain in contamination at low voltage does not balance the contamination reduction due to the decrease of current density connected with the voltage change (Fig.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Nano-Tips by Carbon Contamination in a Scanning Electron Microscope for Use in Scanning Probe Microscopy and Field Emission

Antognozzi

Sentimenti

Valdrè

1997

Microsc. Microanal. Microstruct.

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Abstract. 2014 Results are reported on a systematic study addressed to an effective fabrication of nano-tips by means of carbon contamination in a scanning electron microscope. Nano-tips with angular aperture of 10°, apical radius of about 5 nm,1 03BCm long can be efficiently produced by our method in less than 60 s of electron beam exposure; it involves, in particular, successive focusing during tip growth and the use of a carbon block as a source of contaminant. These tips have been used as high aspect ratio and low capillary force probes in atomic force microscopy, and as nano-sized field emitters for electron guns.

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“…It also greatly 138 reduces the amount of contaminants deposited on the cold finger, water being the main gas species 139 in the chamber (Hart et al 1970;Heide & Urban 1972). The use of a Peltier unit allows long-term 140 operation without the need for LN2 refilling.…”

mentioning

confidence: 99%

Decontamination in the Electron Probe Microanalysis with a Peltier-Cooled Cold Finger

et al. 2016

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A prototype Peltier thermoelectric cooling unit has been constructed to cool a cold finger on an electron microprobe. The Peltier unit was tested at 15 and 96 W, achieving cold finger temperatures of −10 and −27°C, respectively. The Peltier unit did not adversely affect the analytical stability of the instrument. Heat conduction between the Peltier unit mounted outside the vacuum and the cold finger was found to be very efficient. Under Peltier cooling, the vacuum improvement associated with water vapor deposition was not achieved; this has the advantage of avoiding severe degradation of the vacuum observed when warming up a cold finger from liquid nitrogen (LN2) temperatures. Carbon contamination rates were reduced as cooling commenced; by −27°C contamination rates were found to be comparable with LN2-cooled devices. Peltier cooling, therefore, provides a viable alternative to LN2-cooled cold fingers, with few of their associated disadvantages.

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The contamination of surfaces during high-energy electron irradiation

Cited by 51 publications

References 6 publications

Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Fabrication of Nano-Tips by Carbon Contamination in a Scanning Electron Microscope for Use in Scanning Probe Microscopy and Field Emission

Decontamination in the Electron Probe Microanalysis with a Peltier-Cooled Cold Finger

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