The CantiClever: a dedicated probe for magnetic force microscopy

Bos, A. van den; Heskamp, I.R.; Siekman, Martin Herman; Abelmann, Léon; Lodder, Cock

doi:10.1109/tmag.2002.803585

Cited by 17 publications

(9 citation statements)

References 12 publications

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“…From these preliminary experiments we conclude that the MR sensor proposed by us is suitable for integration on cantilever tips. Proper cantilevers for this purpose were already developed in our group [11] and [14].…”

Section: Discussionmentioning

confidence: 99%

“…Our Kerr set-up has a resolution of approximately 500 nm; therefore, smaller magnetization distributions (especially those of the FIB-ed structures) cannot be observed. A much better resolution is obtained with our magnetic force microscope [11], but in the instrument used no external fields could be applied. All these measurements will be used to explain the magnetoresistance response of this structure.…”

Section: Experimental Realization Of the Mr Elementmentioning

confidence: 91%

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A read and write element for magnetic probe recording

Craus¹,

Onoue²,

Ramstöck³

et al. 2005

J. Phys. D: Appl. Phys.

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We present our results on the development of magnetic sensors for application in magnetic probe recording. Successful writing experiments on a magnetic medium with perpendicular anisotropy show that magnetic domains of 130 nm can be reversed in a heat-assisted process. For reading purposes we propose a magnetoresistive sensor. The optimization of the shape of the sensor was performed using micromagnetic simulations with the requirement that the sensor has to be capable of both read and write operations. At this stage, the experimental realization of the sensor was carried out at a wafer-base level. The fabrication technique consists of a combination of optical lithography and focused ion beam etching.

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Section: Discussionmentioning

confidence: 99%

Section: Experimental Realization Of the Mr Elementmentioning

confidence: 91%

A read and write element for magnetic probe recording

Craus¹,

Onoue²,

Ramstöck³

et al. 2005

J. Phys. D: Appl. Phys.

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show abstract

“…The nice spheroidal tip shape with a controlled ellipticity has not realized in the studies of several highresolution tips [1][2][3][4]. It should be noted, however, that the above estimated resolution is valid at the thermal noise limit.…”

Section: Article In Pressmentioning

confidence: 97%

“…In order to realize nanometer resolution with MFM, it is important to develop sensitive MFM tips with small effective tip volume. There are many studies about high-resolution MFM tips, such as perforated tips [1], tips using electron beam-induced deposited carbon needles [2], focused ion beam modified tips [3] and elongated magnetic bar tips using silicon micromachining techniques which are named CantiClever tips [4]. On the other hand, with the current trend of decreasing bit aspect ratio (BAR) in high-density magnetic recording media, such as patterned media, MFM tips suitable for media with low BAR will be also needed.…”

Section: Introductionmentioning

confidence: 99%

Simulation of high-resolution MFM tips for high-density magnetic recording media with low bit aspect ratio

Saito

Rheem

Ishio

2005

Journal of Magnetism and Magnetic Materials

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“…A similar layout for magnetic force microscope (MFM) was studied by Bos et al [287]. In the in-plane configuration, the oscillation direction of the cantilever is parallel to the wafer plane and coincides with the preferable motion direction of different electrostatic microactuators [288] (for example, parallel plate actuators [274], curved electrodes [289], or comb drives [290,291]) allowing their straightforward integration.…”

Section: )mentioning

confidence: 99%

Functional scanning probes for sensing, actuation and deposition

Geerlings¹

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The imaging of objects by standard bright field microscopy is limited by the wavelength of light. An advanced high resolution microscopy technique, based on a relatively simple principle, is atomic force microscopy (AFM). In this technique the topography of a surface is mapped by measuring the force acting on an extremely sharp tip when it is scanned over a surface of interest. Nanoscale resolution can be obtained with AFM, which makes it an indispensable tool for nanotechnology. Next to imaging, even more exciting possibilities become available by the integration of additional functions into the probe. In this thesis, this functionalization of AFM probes is explored.Regarding actuation, the integration of an electrostatic microactuator in the probe was investigated, to obtain a mechanically active AFM probe. The motivation for this work comes from the drive towards high-speed (video-rate) AFM, which requires tips that are sharp and made of a durable material (such as silicon nitride). One of the limiting factors in high-speed AFM is the bulk piezo, which suffers from hysteresis and creep and has limited displacement at higher frequencies. By replacing the piezoelectric actuator by an integrated capacitive micro electro mechanical system (MEMS) actuator, higher scan rates can be obtained. To make the actuator integration more straightforward, a silicon-on-insulator (SOI) compatible fabrication process for the fabrication of in-plane tips (tips directed in the plane of the fabrication wafer) was developed and tested. With this process, sharp silicon nitride tips (best measured radius 8 nm) can be batch fabricated on monocrystalline silicon cantilevers. The in-plane aspect of the fabrication allows for arbitrarily shaped cantilevers.Electrochemical sensing functionality in AFM was obtained by filling a nanofountain pen probe with mercury, resulting in an in-situ renewable mercury microelectrode. Both dropping mercury electrode and hanging mercury droplet configurations were obtained by the control of the pressure on the mercury. In the static droplet configuration, chronoamperometric measurements and cyclic and square-wave voltammograms were obtained with the potential of microscale spatial resolution.Liquid deposition in AFM was studied by using fountain pen probes with various tip geometries. Spotting experiments in contact mode showed a t 0.21±0.01 dependence of the spotsize on the contact time. A significant increase in droplet deposition speed was obtained by writing lines, which subsequently break up into droplets. Regular arrays of mono and bimodal dispersed droplets were obtained by varying the tip-substrate speed. By using electrohydrodynamic deposition, scaled down to micrometer sized gaps, contactless deposition of solids dissolved in liquid was achieved. This technique allows for the deposition of polar liquids on nonwetting surfaces, which is challenging for contact mode techniques. Furthermore, the precise z-control in the AFM setup allows for significantly smaller deposits than can be achieved by, fo...

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The CantiClever: a dedicated probe for magnetic force microscopy

Cited by 17 publications

References 12 publications

A read and write element for magnetic probe recording

A read and write element for magnetic probe recording

Simulation of high-resolution MFM tips for high-density magnetic recording media with low bit aspect ratio

Functional scanning probes for sensing, actuation and deposition

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