2017
DOI: 10.1016/j.vacuum.2017.04.025
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The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique

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Cited by 48 publications
(22 citation statements)
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“…According to the literature, the penetration depth for specimens are adopted as 10% of the overall thickness. Indeed, this adjustment is the main reason preventing any effect of substrate during the measurement …”
Section: Resultsmentioning
confidence: 99%
“…According to the literature, the penetration depth for specimens are adopted as 10% of the overall thickness. Indeed, this adjustment is the main reason preventing any effect of substrate during the measurement …”
Section: Resultsmentioning
confidence: 99%
“…The parameters like microstrain (ε) and dislocation (δ) density were calculated by using Equations 2 and 3, respectively. [11,13,43] cos 4 θ ε β =…”
Section: Characterizationsmentioning
confidence: 99%
“…Recently, fabrication of Fe-doped zinc oxide thin films on a glass substrate using sol-gel spin coating technique was done by Verma et al [24]. Al doping effects on the properties of the ZnO and AZO thin films prepared by RF sputtering technique were also investigated [25]. However, no report is available on the deposition of ZnO:Co thin films by nebulizer spray pyrolysis method.…”
Section: Introductionmentioning
confidence: 99%