Texture of GaAs Nanoparticles Deposited by Pulsed Laser Ablation in Different Atmospheres

Abstract

This work analyzes the effect of nanosecond laser pulse deposition of GaAs in an inert atmosphere of Ar and He. The number of pulses and the gas pressure were varied and the effect on the nanoparticles formation was studied by scanning electron microscopy, grazing incidence small angle X-ray scattering, and atomic force microscopy. It is shown that the GaAs nanoparticle sizes and size distributions can be controlled partly by the number of laser pulses applied during their production and partly by the choice of inert gas and its pressure. Our results suggest that He is a more promising working gas producing narrower size distributions and a better size control of the grown nanoparticles.

Influence of RF excitation during pulsed laser deposition in oxygen atmosphere on the structural properties and luminescence of nanocrystalline ZnO:Al thin films

“…The deposition can be done in vacuum or in reactive or inert atmosphere independently of the sputtering process. There are many parameters that can be varied during deposition, like laser wavelength, laser power, target to substrate distance, temperature and type of substrate, and others [9][10][11][12][13][14][15] . The influence of the oxygen pressure on the structural and optical properties of ZnO deposited by PLD in neutral oxygen atmosphere on heated substrate was studied by several authors 16,17 .…”