LiCoO 2 films were prepared on polycrystalline Al 2 O 3 substrates by metal organic chemical vapor deposition (MOCVD), and the effect of the Li to Co source vapor ratio (R Li/Co ) and substrate temperature (T sub ) on the phases, orientation, morphology, and deposition rates were investigated. At R Li/Co > 2.0, Li 2 CO 3 , Li x Co 1¹x O, and a LiCoO 2 CoO solid solution were co-deposited with LiCoO 2 , whereas Co 3 O 4 was co-deposited with LiCoO 2 at R Li/Co < 0.7. Single-phase LiCoO 2 films were obtained in the R Li/Co range of 0.72.0 at T sub > 873 K. Rutherford backscattering spectrometry revealed that single-phase LiCoO 2 film had uniform and stoichiometric composition. The orientation of single-phase LiCoO 2 films changed from (003) to (104) and (012) with increasing T sub at R Li/Co ³ 1.0. LiCoO 2 film co-deposited with Co 3 O 4 at R Li/Co = 0.4 showed significant (101) orientation. The (003)-oriented LiCoO 2 had a flat surface with hexagonal faceted texture, whereas the (101)-and (104)-oriented LiCoO 2 had platelet grains in which the plate faces were tilted relative to the substrate surface. The highest deposition rate of single-phase LiCoO 2 film was 1020¯m h
¹1, which was 100 times greater than that reported in the literature.