2013
DOI: 10.2109/jcersj2.121.406
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Preparation of Li–Co–O film by metal organic chemical vapor deposition

Abstract: LiCoO 2 films were prepared on polycrystalline Al 2 O 3 substrates by metal organic chemical vapor deposition (MOCVD), and the effect of the Li to Co source vapor ratio (R Li/Co ) and substrate temperature (T sub ) on the phases, orientation, morphology, and deposition rates were investigated. At R Li/Co > 2.0, Li 2 CO 3 , Li x Co 1¹x O, and a LiCoO 2 CoO solid solution were co-deposited with LiCoO 2 , whereas Co 3 O 4 was co-deposited with LiCoO 2 at R Li/Co < 0.7. Single-phase LiCoO 2 films were obtained in … Show more

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Cited by 9 publications
(2 citation statements)
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“…S1(a), ESI †). 27,28 In consideration of the thin film preparation method, the parallel alignment of (003) planes is preferred in layered structure thin film deposited by the PLD technique. 26 The presence of only (003) reflection for the Li-rich film cathode indicates that, within the sensitivity of the measurement, most grains are (003) oriented, i.e., with the c-axis aligned normal to the plane of the film.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…S1(a), ESI †). 27,28 In consideration of the thin film preparation method, the parallel alignment of (003) planes is preferred in layered structure thin film deposited by the PLD technique. 26 The presence of only (003) reflection for the Li-rich film cathode indicates that, within the sensitivity of the measurement, most grains are (003) oriented, i.e., with the c-axis aligned normal to the plane of the film.…”
Section: Resultsmentioning
confidence: 99%
“…26 In addition, the (003) oriented grains usually have a flat surface with hexagonal facet texture; whereas (101) and (104) oriented grains usually have a platelet feature. 27,28 In consideration of the thin film preparation method, the parallel alignment of (003) planes is preferred in layered structure thin film deposited by the PLD technique. 29,30 Therefore, the grains with well-defined hexagon-like geometry [Fig.…”
Section: Grain Orientation Of the Li-rich Thin Film Cathodementioning
confidence: 99%