Texture and columnar structure of evaporated cobalt films: I

Fujiwara, Hiroshi; Hara, Kazuhiro; Kamimori, T.; Takemoto, Keisuke; Hashimoto, Takashi

doi:10.1016/0040-6090(80)90220-5

Cited by 21 publications

(4 citation statements)

References 6 publications

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“…This should be accompanied respectively by either a decrease or increase in the nanocolumn tilt angle (b), which was confirmed by Nakhodkin and Shaldervan [50] for a large variety of materials. Nevertheless, in a systematic investigation of the OAD of magnetic metals and alloys (Co, Ni, Fe), Hara et al [51][52][53][54][55][56] showed that although the aforementioned relation between temperature and deposition rate was generally maintained, other effects besides diffusion must be involved to explain unexpected deviations in the growth tendencies and the appearance of more complex morphological patterns. For a large variety of metals and oxides deposited by DC magnetron sputtering, Deniz et al [49] determined the nanostructuration Cross sectional SEM images of (a) zig-zag nanocolumns obtained by back and forth azimuthal turning of the substrate [63], (b) spiral nanocolumns obtained by continuous azimuthal rotation (i.e., dynamic OAD) [87], (c) zig-zag plus spiral nanocolumns (author's unpublished results), (d) nanocolumns with width modulation obtained by azimuthal rotation and back and forth polar angle tilting [87], and (e) vertical nanocolumns obtained by rapid azimuthal rotation at two different rates [65].…”

Section: Effects Of Temperature and Deposition Rate On The Morphologymentioning

confidence: 96%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

601

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Effects Of Temperature and Deposition Rate On The Morphologymentioning

confidence: 96%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

601

436

View full text Add to dashboard Cite

show abstract

“…The results of texture investigations are therefore different for Co. In the Co films prepared at 70 ° incidence and substrate temperatures above 370 K, two texture orientations were found [56]. Both textures can exist simultaneously in one film.…”

Section: 2] Difference Between Co and Fementioning

confidence: 98%

“…If at a substrate temperature of 213 K the pressure is increased to 8 mPa, the bundling starts at a higher rate and only reaches the At a substrate temperature of 470 K, a pressure of 4 mPa and an incidence angle of 70 °, the effects of change in rate and substrate temperature are small [55,56]. When the rate is increased from 0.1 to 18 nm s -~ the columnar inclination drops from 60 ° to 50 ° at 5 nms -1 and then slowly increases with increasing rate.…”

Section: 2] Difference Between Co and Fementioning

confidence: 99%

Oblique evaporation and surface diffusion

1997

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The special structure of obliquely evaporated films has its origin in shadowing phenomena during film growth. Because of shadowing, the film consists of bundles of inclined columns with the bundles being aligned perpendicularly to the vapour incidence direction. The column inclination angle lies between the film normal and the vapour incidence direction. Different models found in literature relating process parameters and film structure are discussed. It is found that surface diffusion plays an important role, especially with regard to the difference between random and directional surface diffusion. The latter is induced by the oblique evaporation process. A quantitative expression is given for the relation between process conditions and surface diffusion including the influence of substrate temperature, rate and contamination with residual gasses. Using these models and adding our new calculations, the relation between surface diffusion and film structure is discussed in detail and found to be consistent with measurements published in the literature. © 1997 Elsevier Science S.A.

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“…This indicates that the crystallites having the ͕0002͖ texture always lie below the other textures in the film and exist only in the early growth stage, which is the reason why a surfacesensitive technique such as RHEED was not able to detect it, but XRD could. There are earlier studies 34,35 of Co ͑also hcp͒ films evaporated onto a glass substrate at an oblique angle ͑␣ Ϸ 70°͒, with the substrate temperature ranging from 100 to 450°C. In these works, a similar ͕0002͖ pole at about 30°from normal tilted towards the incident flux was re- ported.…”

Section: B Ru Slanted Columns: the Role Of Biased Diffusion For Fixementioning

confidence: 99%

Texture of Ru columns grown by oblique angle sputter deposition

Morrow¹,

Tang²,

Karabacak³

et al. 2006

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Ru films were sputter deposited on native oxide p-Si͑100͒ substrates under normal incidence and oblique angle incidence with and without substrate rotation. We characterized the crystalline texture and morphology of the Ru films by x-ray diffraction, transmission electron microscopy, and scanning electron microscopy. For the case of normal incidence, a smooth, uniform surface layer was observed, and pole figure analysis showed coexisting ͕1010͖, ͕0002͖, and ͕1011͖ normally oriented textures. For oblique angle incidence, we found that the films grown by uniform substrate rotation consist of isolated, vertical columnar structures with a clear pyramidal-shaped apex and display a normal ͕1010͖ fiber texture. Individual vertical columns were found to possess a single-crystal structure. In comparison, Ru films grown without substrate rotation possess a slanted columnar structure. They mainly show a tilted ͕1011͖͕1010͖ two-orientation ͑II-O͒ texture, with non-negligible ͕1010͖͕1120͖ and ͕0002͖ ͕1120͖ II-O textures as well. The formation of textures under oblique angle deposition was ascribed to the competition between crystalline planes having different vertical growth rates, where the planes associated with a higher rate survive from the shadowing effects. We argue that the vertical growth rate is determined by the atom mobility. Under substrate rotation this mobility is correlated with the overall atomic roughness of the crystalline planes. For a fixed substrate the adatom mobility exhibits anisotropic behavior, which is reflected in the biased diffusion.

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Texture and columnar structure of evaporated cobalt films: I

Cited by 21 publications

References 6 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Oblique evaporation and surface diffusion

Texture of Ru columns grown by oblique angle sputter deposition

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