Texture of Ru columns grown by oblique angle sputter deposition

Morrow, Paul E.; Tang, Fu; Karabacak, Tansel; Wang, P.-I.; Ye, D.-X; Wang, G.-C.; Lu, T.‐M.

doi:10.1116/1.2165661

Cited by 34 publications

(18 citation statements)

References 29 publications

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“…This showed that the fiber texture dispersion angle has a scaling behavior. This fiber structure of vertical nanorods was confirmed by x-ray pole figures (Morrow et al 2006). An individual nanorod was examined by TEM, and the TEM diffraction pattern revealed single-crystal structure in the individual nanorod.…”

Section: Ru Nanorods On An Amorphous Substratesupporting

confidence: 53%

RHEED Transmission Mode and RHEED Pole Figure

Wang

2013

RHEED Transmission Mode and Pole Figures

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In the last chapter, we presented the principles of x-ray diffraction and the construction of a pole figure, particularly the pole figure constructed from the diffraction patterns obtained by an area detector. In this chapter, we describe the similarities and differences between reflection high-energy electron diffraction (RHEED) transmission mode and x-ray diffraction. Detailed descriptions of the diffraction space characteristics of RHEED transmission for a variety of crystal textures are given. We discuss kinematic simulations of RHEED patterns and the construction of RHEED pole figures from RHEED patterns. The relationship between RHEED pole figures and the orientation distribution function of biaxial texture is presented with examples. X-Ray Diffraction vs RHEEDMost thin films grown by common deposition techniques such as physical vapor deposition or chemical vapor deposition are not single crystals. Single crystals are grown only under specific favorable conditions. A major technique used for texture structure characterization is the x-ray pole figure. The typical photon energy used in x-ray diffraction is 8,048 eV (Cu K α ), while tens of kiloelectron volt electrons are used for reflection high-energy electron diffraction (RHEED). Here we discuss the similarities and differences between x-ray diffraction and the RHEED transmission mode. Strength of scattering cross sectionThe scattering cross section for electrons in solids is orders of magnitude higher than that for x-rays. For example, the total elastic electron scattering from Mo at 10 keV incident electron energy is on the order of 10 −19 m 2 (Browning 1991). In the energy range of 1-100 keV, the cross-section scales as E −0.5 in the low-energy regime and E −1 and Z 1.33 in the high-energy regime, where E is in units of keV and Z is the atomic number of an atom. For 1 keV photon, the total photon cross section from Pb is on the order of 10 −22 m 2 (Hubbell et al. 1975). The stronger scattering cross section of electrons provides a stronger electron diffraction signal from ultrathin films and nanostructures.

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Section: Ru Nanorods On An Amorphous Substratesupporting

confidence: 53%

RHEED Transmission Mode and RHEED Pole Figure

Wang

2013

RHEED Transmission Mode and Pole Figures

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“…18 In summary, the micrographs in Fig. 1 and 2, for room temperature growth of Ta, Cr, and Al rods, as well as Ta grown at T s = 300-993 K. The plot also includes values from previously reported studies by various researchers on Ti, 40 Ni, 41 W, 42 Cu, 43 Co, 6 Ru, 44 and Al. Figure 2 shows the plan-view ͓͑a͒-͑c͔͒ and crosssectional ͓͑d͒-͑f͔͒ SEM images from Ta nanorods grown on flat substrates at T s = 473, 773, and 973 K, respectively.…”

Section: Resultsmentioning

confidence: 84%

Temperature-induced chaos during nanorod growth by physical vapor deposition

Mukherjee

Zhou

Gall

2009

Journal of Applied Physics

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Atomic shadowing during kinetically limited physical vapor deposition causes a chaotic instability in the layer morphology that leads to nanorod growth. Glancing angle deposition (GLAD) experiments indicate that the rod morphology, in turn, exhibits a chaotic instability with increasing surface diffusion. The measured rod width versus growth temperature converges onto a single curve for all metals when normalized by the melting point Tm. A model based on mean field nucleation theory reveals a transition from a two- to three-dimensional growth regime at (0.20±0.03)×Tm and an activation energy for diffusion on curved surfaces of (2.46±0.02)×kTm. The consistency in the GLAD data suggests that the effective mass transport on a curved surface is described by a single normalized activation energy that is applicable to all elemental metals.

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“…However, the intensity of (002) diffraction peak does not increase as the FWHM decreases among the samples, denoting a complex relationship. This might be due to tilted texture observed in some GLAD nanostructures where crystal planes tend to follow the flux direction [17][18][19]. As can be seen in Table 1 and Fig.…”

Section: Morphological Properties and Crystallinity Of Azo Nanostructmentioning

confidence: 87%

“…Similarly, GLAD Si nanostructures of different shapes (pillars, oblique, helix), which were produced by different substrate rotation speeds at constant deposition angle of 83°, were also reported to have different film densities. Change in the layer densities of our GLAD AZO nanostructures may be explained by a competitive growth dynamics of different crystalline orientations/phases [13][14][15][16]. Although the same deposition angle is expected to provide a same deposition rate (average number of particles coming to the substrate in time), rotation speed can influence the growth rate at a local point.…”

Section: Morphological Properties and Crystallinity Of Azo Nanostructmentioning

confidence: 95%

“…For example, at initial stages, randomly oriented islands can grow together leading to a denser first layer as we observe in our results. This can be followed by a preferential growth of islands with crystal orientations that can follow the obliquely incident flux leading to tilted columns with a tilted crystallographic texture [16]. However, in the case of GLAD spiral or vertical structures, substrate rotation can disrupt the growth of such crystal orientations of tilted columns, and promote the ones that can accommodate substrate rotation and display a higher vertical growth rate compared to the former ones.…”

Section: Morphological Properties and Crystallinity Of Azo Nanostructmentioning

confidence: 98%

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Glancing angle deposited Al-doped ZnO nanostructures with different structural and optical properties

et al. 2015

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Al-doped ZnO (AZO) nanostructure arrays with different shapes (tilted rods, vertical rods, spirals, and zigzags) were fabricated by utilizing glancing angle deposition (GLAD) technique in a DC sputter growth unit at room temperature. During GLAD, all the samples were tilted at an oblique angle of about 90°with respect to incoming flux direction. In order to vary the shapes of nanostructures, each sample was rotated at different speeds around the substrate normal axis. Rotation speed did not only affect the shape but also changed the microstructural and optical properties of GLAD AZO nanostructures. The experimental results reveal that GLAD AZO nanostructures of different shapes each have unique morphological, crystal structure, mechanical, and optical properties determined by scanning electron microscopy, X-ray diffraction, transmission, and reflectance measurements. Vertical nanorods display the largest grain size, minimum strain, lowest defect density, and highest optical transmittance compared to the other shapes. Growth dynamics of GLAD has been discussed to explain the dependence of structural and optical properties of nanostructures on the substrate rotation speed.

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Texture of Ru columns grown by oblique angle sputter deposition

Cited by 34 publications

References 29 publications

RHEED Transmission Mode and RHEED Pole Figure

RHEED Transmission Mode and RHEED Pole Figure

Temperature-induced chaos during nanorod growth by physical vapor deposition

Glancing angle deposited Al-doped ZnO nanostructures with different structural and optical properties

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