a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

A compromise between high power conversion efficiency and long-term stability of hybrid organic-inorganic metal halide perovskite solar cells is necessary for their outdoor photovoltaic application and commercialization. Herein, a method to improve the stability of perovskite solar cells under water and moisture exposure consisting of the encapsulation of the cell with an ultrathin plasma polymer is reported. The deposition of the polymer is carried out at room temperature by the remote plasma vacuum deposition of adamantane powder. This encapsulation method does not affect the photovoltaic performance of the tested devices and is virtually compatible with any device configuration independent of the chemical composition. After 30 days under ambient conditions with a relative humidity (RH) in the range of 35-60%, the absorbance of encapsulated perovskite films remains practically unaltered. The deterioration in the photovoltaic performance of the corresponding encapsulated devices also becomes significantly delayed with respect to devices without encapsulation when vented continuously with very humid air (RH > 85%). More impressively, when encapsulated solar devices were immersed in liquid water, the photovoltaic performance was not affected at least within the first 60 s. In fact, it has been possible to measure the power conversion efficiency of encapsulated devices under operation in water. The proposed method opens up a new promising strategy to develop stable photovoltaic and photocatalytic perovskite devices.

This paper reports a thorough microstructural characterization of glancing angle deposited (GLAD) TiO(2) thin films. Atomic force microscopy (afm), grazing-incidence small-angle x-ray scattering (GISAXS) and water adsorption isotherms have been used to determine the evolution of porosity and the existence of some correlation distances between the nanocolumns constituting the basic elements of the film's nanostructure. It is found that the deposition angle and, to a lesser extent, the film thickness are the most important parameters controlling properties of the thin film. The importance of porosity and some critical dimensions encountered in the investigated GLAD thin films is highlighted in relation to the analysis of their optical properties when utilized as antireflective coatings or as hosts and templates for the development of new composite materials.

Moisture-induced degradation in perovskite solar cells was thoroughly investigated by structural (SEM, EDS, XRD and XPS) and device characterization (impedance and intensity modulated photocurrent spectroscopy) techniques.

Doping TiO2 with nitrogen is recognized as a procedure to get sensitization of this material with visible light. In the present work, incorporation of nitrogen within the structure of TiO2 thin films has been accomplished by N2 + ion implantation in TiO2 anatase thin films (50 keV ion energy for doses of 3 × 1016, 6 × 1016, and 1.2 × 1017 ions cm-2) and during preparation by metalorganic chemical vapor deposition (MOCVD) using nitrogen as carrier gas. The analysis of the samples by X-ray photoemission spectroscopy (XPS) and for the MOCVD samples also by secondary ion mass spectroscopy (SIMS) has shown that nitrogen, in the form of nitride-like species, (N/Ti ratios of 0.03 and 0.12 for the MOCVD and the implanted samples, respectively) has become effectively incorporated within the structure of TiO2. The water contact angle on the implanted thin films varied from about 80° to around 30° when illuminated with visible light, depending on the ion dose. Similarly, the MOCVD samples showed a sharp decrease in wetting contact angle under visible light from about 80° to 55°. In the two cases, the thin films reach total hydrophilicity by posterior UV irradiation. To account for these results, the possible existence of specific excitation mechanisms for visible or UV photons, the former involving the incorporated nitrogen atoms, is discussed.

Figure 2 . SEM images of the hybrid systems as labeled: a,b) deposited on Ag/Si(100) substrates; c-f) on a SiO 2 nanocolumnar fi lm; g,h) on PDMS. Color photograph in i) was taken for the hybrid system PtOEP/TiO 2 (meso) deposited on the fl exible PDMS substrate. This image is characterized by the intense red coloration of the PtOEP NWs.

A new type of superhydrophobic material consisting of a surface with supported Ag@TiO(2) core-shell nanofibers has been prepared at low temperature by plasma-enhanced chemical vapor deposition (PECVD). The fibers are formed by an inner nanocrystalline silver thread which is covered by a TiO(2) overlayer. Water contact angles depend on the width of the fibers and on their surface concentration, reaching a maximum wetting angle close to 180 degrees for a surface concentration of approximately 15 fibers microm(-2) and a thickness of 200 nm. When irradiated with UV light, these surfaces become superhydrophilic (i.e., 0 degrees contact angle). The decrease rate of the contact angle depends on both the crystalline state of the titania and on the size of the individual TiO(2) domains covering the fibers. To the best of our knowledge, this is one of the few examples existing in the literature where a superhydrophobic surface transforms reversibly into a superhydrophilic one as an effect of light irradiation.

N-doped TiO 2 thin films have been prepared by plasma enhanced chemical vapor deposition and by physical vapor deposition by adding nitrogen or ammonia to the gas phase. Different sets of N-doped TiO 2 thin films have been obtained by changing the preparation conditions during the deposition. The samples have been characterized by X-ray diffraction, Raman, UV-vis spectroscopy, and X-ray photoemission spectroscopy (XPS). By changing the preparation conditions, different structures, microstructures, and degrees and types of doping have been obtained and some relationships have been established between these film properties and their visible light photoactivity. The N1s XP spectra of the samples are characterized by three main features, one tentatively attributed to Ti-N (i.e., nitride with a binding energy (BE) of 396.1 eV) and two others with BEs of 399.3 and 400.7 eV, tentatively attributed to nitrogen bonded simultaneously to titanium and oxygen atoms (i.e., Ti-N-O like species). By controlling the deposition conditions it is possible to prepare samples with only one of these species as majority component. It has been shown that only the samples with Ti-N-O like species show surface photoactivity being able to change their wetting angle when they are illuminated with visible light. The presence of these species and an additional complex structure formed by a mixture of anatase and rutile phases is an additional condition that is fulfilled by the thin films that also present photocatalytic activity with visible light (i.e., surface and Schottky barrier driven photoactivities). The relationships existing between the reduction state of the samples and the formation of Ti-N or Ti-N-O like species are also discussed.