Tetrahedral Amorphous Carbon Films By Filtered Cathodic Vacuum-Arc Deposition For Air-Bearing-Surface Overcoat

Inaba, Hiroshi; Furusawa, K.; Hirano, Shinya; Sasaki, Shinji; Todoroki, S.; Yamasaka, M.; Endou, M.

doi:10.1143/jjap.42.2824

Cited by 18 publications

(9 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…One shortcoming of deposition by arc discharge is that it generates numerous particulates several microns in size. FCVA was developed to prevent generated particulates from reaching the substrate [7,8]. In the present study, an FCVA system made by Nanofilm Technology Institute (NTI) was used.…”

Section: Methodsmentioning

confidence: 99%

XPS study of ultrathin carbon films prepared by filtered cathodic vacuum arc

Yasui

Inaba

Sasaki

2006

e-J. Surf. Sci. Nanotechnol.

Self Cite

View full text Add to dashboard Cite

Diamond like carbon (DLC) films have attracted increasing attention in a variety of industries due to their excellent mechanical and chemical properties. To meet the demands from the emerging industries, such as micro electro mechanical systems (MEMS), a considerable number of research studies have been conducted to advance the technology for thin DLC films fabrication. However, it has been reported that the properties of DLC films vary with thickness, which necessitate further understanding of the mechanism of initial film growth. To elucidate the mechanism of carbon film growth, the present study employs X-ray photoelectron spectroscopy (XPS) to characterize two types of amorphous carbon films fabricated by cathodic vacuum arc discharge and radio-frequency magnetron sputtering. The results indicated that wide range of energy distribution of carbon ions in the cathodic arc discharge caused a decline in the sp 3 ratio with decreasing thicknesses.

show abstract

Section: Methodsmentioning

confidence: 99%

XPS study of ultrathin carbon films prepared by filtered cathodic vacuum arc

Yasui

Inaba

Sasaki

2006

e-J. Surf. Sci. Nanotechnol.

Self Cite

View full text Add to dashboard Cite

show abstract

“…1) Many methods have been develped to improve the basic properties of titanium devices. 2,3) Diamond-like carbon (DLC) is a well-known coating material for a wide range of fields from wrist watches to car motors [4][5][6][7] owing to its high durability, high hardness, and low friction. DLC has been widely studied from many aspects such as hydrogen content, bond components, and mass density.…”

Section: Introductionmentioning

confidence: 99%

Preparation of Diamond-Like Carbon on Ti Film with Tetramethylsilane Buffer Layer

Kaneko

Horiuchi

Ito

et al. 2013

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Diamond-like carbon (DLC) has been applied as a coating material to improve the basic properties of strength, chemical stability, and biocompatibility. In this study, a DLC film was prepared on a titanium (Ti) coating film with tetramethylsilane (TMS) buffer for application in vivo. Although the surface roughness of the Ti film increased with increasing Ti thickness, both TMS and DLC coatings deposited on Ti films resulted in the formation of a flat surface. Observation of the initial growth of the TMS layer indicated that a TMS buffer of more than 50 nm thickness was required for DLC coating even on the flat surface of the Ti thin film.

show abstract

“…The general growth rates of these films deposited by plasma-enhanced CVD are reported in the range of 0.5-5 μm/h [2,3], and CVD amorphous carbon films have been widely used in industry mainly to provide wear resistant and lubricative properties with the sliding surfaces such as recording media, tools and mechanical parts. On the other hand, physical vapor deposition (PVD) techniques, such as filtered cathodic vacuum arc deposition [4], mass separated ion beam deposition [5], laser assisted deposition [6] and sputtering, are the most preferable methods for developing unhydrogenated amorphous carbon films. The unhydrogenated amorphous carbon films can be harder than CVD films and also commercially used as a coating for magnetic head sliders and cutting tools.…”

Section: Introductionmentioning

confidence: 99%