Deposition of amorphous carbon films from C60 fullerene sublimated in electron beam excited plasma

Taghavi, Hamed Vaez; Hirata, Atsushi

doi:10.1016/j.diamond.2011.06.002

Cited by 7 publications

(2 citation statements)

References 38 publications

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“…10,11) A graphite plate (Tokai Carbon G530) with a diameter of 100 mm was used as the target. The target power was adjusted to be 300 W. The negative bias applied to the substrate during substrate sputtering was measured by a Vdc/Vpp meter (JEOL EH-RBS10) 12,13) and controlled by rf power to the substrate. 14) Al alloy (JIS AA2017, 3.5-4.5% Cu) disks ( ¼ 24 mm, t ¼ 6 mm) were used as substrates.…”

Section: Experimental Methodsmentioning

confidence: 99%

Nanoindentation Fracture Behaviors of Diamond-Like Carbon Film on Aluminum Alloy with Different Interface Toughnesses

Nose

Sasaki

Kamiko

et al. 2012

Jpn. J. Appl. Phys.

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Fracture behaviors of a diamond-like carbon (DLC) film on an aluminum alloy (AA2017) were analyzed by a nanoindentation test under conditions of deep and full penetrations of an indenter tip through the DLC film. The interface structure between the DLC and AA2017 was modified by using the substrate sputtering and redeposition (SSRD) method. The films deposited with a shorter (30 min) SSRD duration showed weak adhesion to the substrate and often resulted in wide delamination from the impressions. At the same time, films deposited with a longer (120 min) SSRD duration showed no such delamination. Obvious brittle fractures were detected in the load-displacement curves mainly in the film with the short SSRD duration. These results suggest that a long SSRD inhibited the delamination of the DLC film from AA2017 under local and strong stress conditions because of the improved interface toughness. #

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Section: Experimental Methodsmentioning

confidence: 99%

Nanoindentation Fracture Behaviors of Diamond-Like Carbon Film on Aluminum Alloy with Different Interface Toughnesses

Nose

Sasaki

Kamiko

et al. 2012

Jpn. J. Appl. Phys.

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“…To avoid damage caused by removing the transferring layer and organic contaminant introduced in this step, we used fullerene as a support layer instead. Due to the different heat stability of fullerene and graphene, fullerene could be evaporated and removed while graphene keeps intact under the appropriate temperature [22][23][24]. Apart from the key improvement detailed above, the general technical route of our method is similar to the traditional PMMA transfer method.…”

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confidence: 99%

Advanced transferring of large-area freestanding graphene films by using fullerenes

Fu¹,

Qiao²,

Song³

et al. 2019

Nanotechnology

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Freestanding graphene films are desired to be widely applied in biosensor fabrication due to their distinctive physical properties and improved performance. Chemical vapor deposition has been developed to efficiently fabricate large-area graphene. However, some of the fabricated graphene films might break or be contaminated in the current transferring step using polymers. A stable and high-quality transfer method is needed. Herein, we report on an advanced transfer method of large-area graphene film which uses fullerene as a supporting substrate. Unlike polymers, which are commonly eliminated by being dissolved in an organic solution, fullerene can be easily removed by evaporation in a vacuum because it has a different heat stability to graphene. By using the improved transferring method, the percentage of integrated freestanding films after transferring was increased from 60.7% to 93.4%. The vacuum is beneficial in terms of keeping the brittle freestanding films intact. Graphene films transferred using fullerene showed an advanced flatness and a simplicial elementary composition in comparison to those transferred using polymers. Even through there is trace residue, this stable allotrope of graphene is considered to have almost no impact on biomolecule sensing. These advantages make the fullerene transferring method an attractive candidate for fabricating large-area freestanding graphene films, especially for using in the field of biochemistry analysis and biosensors.

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The piezoresistive performances of the devices with fullerene-doped MEH-PPV films

Xia

et al. 2021

Microsyst Technol

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Deposition of amorphous carbon films from C60 fullerene sublimated in electron beam excited plasma

Cited by 7 publications

References 38 publications

Nanoindentation Fracture Behaviors of Diamond-Like Carbon Film on Aluminum Alloy with Different Interface Toughnesses

Nanoindentation Fracture Behaviors of Diamond-Like Carbon Film on Aluminum Alloy with Different Interface Toughnesses

Advanced transferring of large-area freestanding graphene films by using fullerenes

The piezoresistive performances of the devices with fullerene-doped MEH-PPV films

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