2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design ( 2016
DOI: 10.1109/smacd.2016.7520745
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Test structures for residual stress monitoring in the integrated CMOS-MEMS process development

Carlos Ramon Baez Alvarez
1
,
Mónico Linares Aranda
2
,
A. Torres‐Jácome
3
et al.
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