1987
DOI: 10.1117/12.937868
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Template-Set Approach to VLSI Pattern Inspection

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“…pixel-by-pixel comparisons) and local-property inspection methodologies (i.e. local-pattern template matching) [15]. This limitation to black and white image processing prevents identification of certain classes of defects, and it is clear that inspection can be greatly enhanced by the use of color vision.…”
Section: Introductionmentioning
confidence: 99%
“…pixel-by-pixel comparisons) and local-property inspection methodologies (i.e. local-pattern template matching) [15]. This limitation to black and white image processing prevents identification of certain classes of defects, and it is clear that inspection can be greatly enhanced by the use of color vision.…”
Section: Introductionmentioning
confidence: 99%