Effect of growth temperature on Curie temperature of magnetic ultrathin films Co/Cu (100) Ultrathin films of Co were grown on Cu͑100͒ and characterized by nanometer resolution secondary electron microscopy, Auger electron spectroscopy, and the surface magneto-optic Kerr effect. An unexpected out-of-plane remanence was detected in many films. The anisotropy of atoms near defects along the Co/vacuum interface calculated via the Néel model indicates that atoms at the bottom corner of a step edge are canted out-of-plane. Full three-dimensional micromagnetics simulations which incorporate site specific anisotropy ͑including step edges, kinks, and voids͒ have been performed. Simulations with unidirectional arrays of ͓11 គ0͔ steps, such as vicinal surfaces, do not exhibit out-of-plane remanence. Simulations with facets consisting of connected ͓110͔ and ͓11 គ0͔ steps exhibit out-of-plane remanence of 0.03. This is lower than the experimental value of 0.11.