Temperature Coefficients of the Elastic Constants of SiO<inf>2</inf>Layers

Temperature-compensated high-stability silicon resonators

“…[10][11][12][13][14][15] For thin SiO 2 coatings, the coefficient of thermal expansion of silicon, ␣ Si ͑25°C͒ Ϸ 2.6 ppm/°C, is used to approximate the temperature dependent geometry changes. Two of the first order temperature coefficients of interest in the Si-SiO 2 composite are TCE 1,Si͕110͖ ͑25°C͒ Ϸ −63.8 ppm/°C ͑Ref.…”