Technological process for a new silicon solar cell structure with honeycomb textured front surface

Manea, E.; Budianu, E.; Purica, M.; Cernica, I.; Babarada, F.

doi:10.1016/j.solmat.2006.03.036

Cited by 19 publications

(7 citation statements)

References 2 publications

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“…2-a,b and with solution KOH25% at 80°C Fig. 2-c, [3]. Texturizing results in a roughness of the surface, which perform a longer optical path for light which has enter into the cell, thus increasing light absorption and solar cell efficiency [4].…”

Section: Technological Processmentioning

confidence: 99%

The laboratory technology of crystalline silicon solar cells

Burtescu

Pârvulescu

Babarada

et al. 2008

2008 International Semiconductor Conference

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This paper presents the solar cells fabrication on multicrystalline silicon substrate with maximum efficiency of 13% by laboratory technology and main equipments used to characterization of such devices. The main objective was the minimizing the production cost maintaining the device performances. For these reasons the general concept of the technology consists of maximum seven steps, was used multicrystalline silicon substrate, the frontsurface solar cell was texturized in order to reduce the light reflectivity and the wafer back side was p+ diffused in order to have low series resistance.

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Section: Technological Processmentioning

confidence: 99%

The laboratory technology of crystalline silicon solar cells

Burtescu

Pârvulescu

Babarada

et al. 2008

2008 International Semiconductor Conference

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“…[5][6][7] Various surface texturing techniques have been studied to improve solar cell efficiency, such as lithography for honeycombs, the use of inverse pyramids, laser texturing, reactive ion etching, and the use of silicon nanowires with Ag particles. [8][9][10][11][12][13][14][15][16] Among these techniques, the use of silicon nanowire structures formed with Ag particles has the advantages of excellent light trapping with multiple scattering of absorbed light and a grated reflectance index. 17,18) In addition, this texturing technique is relatively simple and does not need expensive equipment.…”

Section: Introductionmentioning

confidence: 99%

Surface Texturing of Crystalline Silicon Solar Cell Using Silicon Nanowires

Seon¹,

Kang²,

Park³

et al. 2013

Jpn. J. Appl. Phys.

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Surface texturing with silicon nanowires on a pyramidal structure was explored by simple metal-assisted chemical etching to improve the electrical performance of a silicon solar cell. The length of nanowires was controlled by changing the etching time in a H 2 O 2 /HF solution after Ag ion adsorption. The weighted reflectance from 300 to 1200 nm was reduced to as low as 4.6% with a 200-nm-long nanowire formed by 30 s etching, while the pyramid surface had a 12.3% reflectance before antireflection (AR) coating deposition. However, the surface textured with 200-nm-long silicon nanowires had a similar reflectance, even after AR coating, and a decreased conversion efficiency in the completed solar cell. Since the silicon wafer with 200-nm-long nanowires had a deep and narrow structure, the AR layer could not be deposited uniformly, which resulted in a low passivation quality and an antireflection effect. This means that the surface structure, even with low reflectance, cannot be appropriate in the cell fabrication process because it is not capable of improving the solar cell performance characteristics. On the other hand, the 30-nm-long nanowire-textured silicon solar cell formed by 2 s etching had a decreased reflectance and improved electrical properties. As a result, the 30-nmlong silicon nanowire-textured solar cell exhibited improved performance characteristics, ÁJ sc ¼ 0:3 mA/cm 2 , ÁV oc ¼ 2 mV, and Á ¼ 0:2%, compared with only a pyramidal textured surface. This suggests that a respectable quality in the passivation and antireflection layers, as well as reflectance reduction, in nanoscale-textured silicon solar cells is required for silicon solar cell performance.

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“…The fabrication of screen-printed contacts for high efficiency solar cells requires high doping and deep diffusion under the fingers (metal contacts) and a lowly doped and thin zone between them. Such an emitter structure can be realized using two diffusion steps and photolithography, but this does not meet the industrial requirements [6]. Indeed, this technology is time consuming and expensive because of the use of photo-resist mask patterning and metal e-beam evaporation.…”

Section: Introductionmentioning

confidence: 99%

Porous silicon used as an oxide diffusion mask to produce a periodic micro doped n⁺⁺/n regions

Dimassi

Jafel

Lajnef

et al. 2010

Phys. Status Solidi C

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The realization of screen‐printed contacts on silicon solar cells requires highly doped regions under the fingers and lowly doped and thin ones between them. In this work, we present a low‐cost approach to fabricate selective emitter (n++/n doped silicon regions), using oxidized porous silicon (ox‐PS) as a mask. Micro‐periodic fingers were opened on the porous silicon layer using a micro groove machining process. Optimized phosphorous diffusion through the micro grooved ox‐PS let us obtain n++ doped regions in opened zones and n doped large regions underneath the ox‐PS layer. The dark I‐V characteristics of the obtained device and Fourier transform infrared (FTIR) spectroscopy investigations of the PS layer show the possibility to use PS as a dielectric layer. The Light Beam Induced Current (LBIC) mapping of the realized device, confirm the presence of a micro periodic n++/n type structure. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Technological process for a new silicon solar cell structure with honeycomb textured front surface

Cited by 19 publications

References 2 publications

The laboratory technology of crystalline silicon solar cells

The laboratory technology of crystalline silicon solar cells

Surface Texturing of Crystalline Silicon Solar Cell Using Silicon Nanowires

Porous silicon used as an oxide diffusion mask to produce a periodic micro doped n⁺⁺/n regions

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Technological process for a new silicon solar cell structure with honeycomb textured front surface

Cited by 19 publications

References 2 publications

The laboratory technology of crystalline silicon solar cells

The laboratory technology of crystalline silicon solar cells

Surface Texturing of Crystalline Silicon Solar Cell Using Silicon Nanowires

Porous silicon used as an oxide diffusion mask to produce a periodic micro doped n++/n regions

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Porous silicon used as an oxide diffusion mask to produce a periodic micro doped n⁺⁺/n regions