Tabletop x-ray microscope using 8 keV zone plates

Development of Multilayer Laue Lenses; (1) Linear Type

“…It would be difficult in principle to fabricate features smaller than ~10 nm and to get a higher aspect ratio than ~20 with conventional electron beam lithography. To overcome these difficulties, a multilayer (or sputtered-sliced) zone plate was proposed by Rudolph et al [1] and has been developed by a few groups [2][3][4]. However, the smaller the zone width becomes, the lower the local diffraction efficiency becomes due to the volume effect.…”

Fabrication of wedged multilayer Laue lenses

“…The first transmissive structures that were fabricated by layer deposition were thick gratings and zone plates prepared by depositing a multilayer onto a flat substrate [5] or on a thin cylindrical wire [6] and then slicing it to the desired depth along the optic axis. These were built as analogues of the thin diffractive optics fabricated by lithography for soft X-rays, but with an increased depth to achieve a significant phase difference on transmission through the two different layer materials.…”

Materials for multilayer x-ray optics at wavelengths below 100 A

“…For example, a zone plate designed to focus a beam of x rays to a point would pass only those portions of the beam that will interfere constructively at the point. In spite of practical limits on the resolution of zone plates, they have found application in several areas, including x-ray 12 The class of optical elements we are concerned with-mu!-tilayer mirrors-achieves high near-normal-incidence reflectivity by constructive addition of the contributions from many single interfaces. Because multilayer x-ray mirrors are interference filters tuned to a specific wavelength, they are inherently wavelengthselective.…”