Synthesis of thin films of Cr, Mo and W carbides and nitrides

Reniers, François; Detroye, M; Kacim, S.; Kons, P.; Maoujoud, M.; Silberberg, E.; Begrani, M. Soussi el; Vandevelde, Thierry; Buess‐Herman, C.

doi:10.1007/978-94-009-1565-7_14

Cited by 2 publications

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“…A side parameter is also the deposition time, as a conventional approach tells us that one needs to operate at low deposition rates to obtain the best coatings. Although the contribution of our group was minor in that domain, we also could deposit epitaxial films of Ag, Pd, and AgPd alloys, Cu, Rh, Pd, CuPd and CuRh alloys [7] as well as crystalline carbide and nitride films (MoC, WC, MoN, WN, CrC [8,9]). Classically, most of such coatings that provide a significant added value to the material are deposited under vacuum, as it offers an excellent control on the remaining gas impurities, it allows tuning the energy of the particles arriving on the substrate thanks to their high mean free path, and it allows complex chemistry (oxides, carbides, nitrides, alloys, …).…”

Section: Introductionmentioning

confidence: 99%

Improving the atmospheric plasma deposition of crystalline inorganic coatings

et al. 2019

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The deposition of good quality crystalline inorganic coatings by atmospheric pressure dielectric barrier discharge remains a challenge. Thanks to an original coupling of a substrate heating device based on an inductive current loop and located under the dielectric and an atmospheric pressure dielectric barrier discharge, we show that one can deposit in one step crystalline vanadium oxide and titanium oxide, with grain sizes bigger than those achieved by post-deposition annealing.

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Section: Introductionmentioning

confidence: 99%

Improving the atmospheric plasma deposition of crystalline inorganic coatings

et al. 2019

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Room Temperature Ion Beam Synthesis of Ultra‐Fine Molybdenum Carbide Nanoparticles: Toward a Scalable Fabrication Route for Earth‐Abundant Electrodes

Fiedler

Malone

Mitchell

et al. 2023

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Molybdenum carbides are promising low‐cost electrocatalysts for electrolyzers, fuel cells, and batteries. However, synthesis of ultrafine, phase‐pure carbide nanoparticles (diameter < 5 nm) with large surface areas remains challenging due to uncontrollable agglomeration that occurs during traditional high temperature syntheses. This work presents a scalable, physical approach to synthesize molybdenum carbide nanoparticles at room temperature by ion implantation. By tuning the implantation conditions, various molybdenum carbide phases, stoichiometries, and nanoparticle sizes can be accessed. For instance, molybdenum ion implantation into glassy carbon at 30 keV energy and to a fluence of 9 × 1016 at cm−2 yields a surface η‐Mo3C2 with a particle diameter of (10 ± 1) nm. Molybdenum implantation into glassy carbon at 60 keV to a fluence of 6 × 1016 at cm−2 yields a buried layer of ultrafine γ’‐MoC/η‐MoC nanoparticles. Carbon ion implantation at 20 keV into a molybdenum thin film produces a 40 nm thick layer primarily composed of β‐Mo2C. The formation of nanoparticles in each molybdenum carbide phase is explained based on the Mo‐C phase diagram and Monte‐Carlo simulations of ion‐solid interactions invoking the thermal spike model. The approaches presented are widely applicable for synthesis of other transition metal carbide nanoparticles as well.

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Synthesis of thin films of Cr, Mo and W carbides and nitrides

Cited by 2 publications

References 9 publications

Improving the atmospheric plasma deposition of crystalline inorganic coatings

Improving the atmospheric plasma deposition of crystalline inorganic coatings

Room Temperature Ion Beam Synthesis of Ultra‐Fine Molybdenum Carbide Nanoparticles: Toward a Scalable Fabrication Route for Earth‐Abundant Electrodes

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