2019
DOI: 10.1016/j.tsf.2019.137437
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Improving the atmospheric plasma deposition of crystalline inorganic coatings

Abstract: The deposition of good quality crystalline inorganic coatings by atmospheric pressure dielectric barrier discharge remains a challenge. Thanks to an original coupling of a substrate heating device based on an inductive current loop and located under the dielectric and an atmospheric pressure dielectric barrier discharge, we show that one can deposit in one step crystalline vanadium oxide and titanium oxide, with grain sizes bigger than those achieved by post-deposition annealing.

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Cited by 4 publications
(3 citation statements)
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“…An AFS G10S-V AC power supply, operating at 2.7 kHz, is connected to the high-voltage electrode. A homemade induction system, described in detail elsewhere [24], allows the heating of the sample holder. The temperature of the sample holder was calibrated using an infrared camera.…”
Section: Synthesis Of Tio X and Tio X -N Thin Filmmentioning
confidence: 99%
See 1 more Smart Citation
“…An AFS G10S-V AC power supply, operating at 2.7 kHz, is connected to the high-voltage electrode. A homemade induction system, described in detail elsewhere [24], allows the heating of the sample holder. The temperature of the sample holder was calibrated using an infrared camera.…”
Section: Synthesis Of Tio X and Tio X -N Thin Filmmentioning
confidence: 99%
“…Besides a fine control of the morphology, no crystalline TiO 2 structure has been reported after deposition. Recently, the heating of the substrate during the deposition at 673 K has been used to allow a spontaneous crystallization of the TiO x film [24]. However, no insight into the evolution of the composition of the film has been reported.…”
Section: Influence Of the Substrate Temperaturementioning
confidence: 99%
“…Because of their relative ease of use and implementation, they have been widely used in research laboratories and industries for gas conversion, [ 1,2 ] activation of surfaces, [ 3,4 ] deposition of polymeric coatings, [ 5 ] and even synthesis of crystalline inorganic coatings. [ 6 ] Indeed, one of the oldest processes for ozone generation, that is, the Siemens process, dating back to 1857, is based on a DBD. [ 7 ] Recently, DBDs for gas conversion have regained interest due to their capacity to create a specific mix of reactive molecules and atoms, without requiring complex heat management and losses associated with a thermalized discharge.…”
Section: Introductionmentioning
confidence: 99%