2017
DOI: 10.1166/jnn.2017.13818
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Synthesis of Patterned Vertically Aligned Carbon Nanotubes by PECVD Using Different Growth Techniques: A Review

Abstract: Immense development has been taken place not only to increase the bulk production, repeatability and yield of carbon nanotubes (CNTs) in last 25 years but preference is also given to acknowledge the basic concepts of nucleation and growth methods. Vertically aligned carbon nanotubes (VAC-NTs) are forest of CNTs accommodated perpendicular on a substrate. Their exceptional chemical and physical properties along with sequential arrangement and dense structure make them suitable in various fields. The effect of di… Show more

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Cited by 28 publications
(13 citation statements)
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References 97 publications
(117 reference statements)
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“…In the second category, the arrangement occurs after growth. There have been several review articles written about the alignment methods of CNTs [ 6 , 31 35 ]. However, most of these focus on the synthesis of aligned CNTs, and the number of methods reporting the arrangement of CNTs after their production is limited.…”
Section: Reviewmentioning
confidence: 99%
“…In the second category, the arrangement occurs after growth. There have been several review articles written about the alignment methods of CNTs [ 6 , 31 35 ]. However, most of these focus on the synthesis of aligned CNTs, and the number of methods reporting the arrangement of CNTs after their production is limited.…”
Section: Reviewmentioning
confidence: 99%
“…Controlled growth of CNTs having specific density along with various alignment degree can also be readily conducted by modulation of recipe parameters. The density control can be induced by many means such as feed gas regulation [10,11] and catalyst patterning [12][13][14], but here we demonstrate one strategy for density control Fig. 3 Completed CVD system in comparison to a commercially-available one and the developed standard recipe: a our developed desktop CVD, b commercial CVD, and c standard recipe for CNT growth in the completed CVD system based on the modulation of annealing time (i.e., time of Ar/H 2 flowing at the peak temperature, as marked in Fig.…”
Section: System Operation Results: Controlled Carbon Nanotube Growthmentioning
confidence: 99%
“…In the past years, CNTs have been produced through arc discharge, laser ablation, fluidized bed CVD, fixed-bed CVD, plasma enhanced CVD, etc. [1][2][3][4][5][6]. Each one has its own merits and drawbacks.…”
Section: Introductionmentioning
confidence: 99%
“…CVD is the most widely used method for the production of a high-carbon yield with selective growth. It is a relatively low-cost approach among the reported methods of synthesis of CNTs [5,6]. During CVD synthesis of CNTs, a carbon precursor decomposes over a pure or mixed metal catalyst in a high-temperature environment.…”
Section: Introductionmentioning
confidence: 99%