We
present a mold-free high-resolution nanopatterning technology
named piezo-actuated one-axis vibrational patterning (POP) that enables
continuous and scalable fabrication of micro- and nanopatterns with
precisely programmable periods and dimensions. POP utilizes the piezoelectric
stack-actuated high-precision uniaxial vibration of a flat, pattern-free
rigid tool edge to conduct sub-50 nm-periodic indentations on various
compliant substrates laterally fed underneath. By controlling the
tool vibration frequency, tool temperature, and substrate feed rate
and by combining sequential tool strokes along multiple directions,
diverse functional micro- and nanopatterns with variable periods and
depths and multidimensional profiles can be continuously created without
resorting to mold prefabrication. With its simple but universal principle,
excellent scalability, and versatile processability, POP can be practically
applied to many functional devices particularly requiring large-area
micro- and nanopatterns with specifically designed periods and dimensions.
We have rationally designed and developed a fully automated desktop furnace system that enables programmable chemical vapour deposition growth of carbon nanotubes with controlled height, density, and pattern architecture. Comprising several essential components involving a heating furnace, mass flowmeters, and computer controller, the developed system realizes controlled and practical carbon nanotube growth without resort to expensive and ponderous instruments. By programming, modifying, and loading the reusable recipes in the developed system, systematic and reproducible growths of carbon nanotubes with desired morphology and dimension can be performed. Growth results with controlled height, density, and pattern are demonstrated through the actual operations, confirming the validity and usefulness of the developed system towards various practical applications.
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