Synthesis of aromatic polyimide film by vacuum deposition polymerization

Takahashi, Yoshikazu; Iijima, Masayuki; Inagawa, Konosuke; Itoh, Akio

doi:10.1116/1.574429

Cited by 144 publications

(47 citation statements)

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“…The direction of current flow when stress was applied was opposite to that when stress was released, and such directions were consistent with the poling direction. This indicates that the signals are purely piezoelectric by definition [16][17][18] .…”

Section: Resultsmentioning

confidence: 99%

“…They are potentially applicable as key components of flexible memories [2][3][4][5][6] , transducers 7,8) , power sources 9,10) , and printable thermal sensors 11) . Polyurea (PU) has unique characteristics among the piezoelectric polymers because it can be fabricated by vapor deposition polymerization without by-products [12][13][14][15][16] . The high dipole moment (4.9 D) in its unit structure coming from the urea bond is also attractive because the strength of spontaneous polarization strongly depends on the dipole moment.…”

Section: Introductionmentioning

confidence: 99%

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Electric Double Layer Gate Field-Effect Transistors Based on Si

Yanase

Shimada

Hasegawa

2010

Jpn. J. Appl. Phys.

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We demonstrate that polyurea films can be prepared by alternating deposition with automated deposition control involving quartz crystal microbalance monitoring and optical source heating. The thickness of the films was linearly controlled by changing the repetition time of deposition, and the stoichiometry obtained was much higher than + 5%.The surface roughness of a 600-nm-thick film was 0.5 nm, which ensures the nm thickness control of the deposited polymers. The piezoelectricity of the films was confirmed by directly measuring the current transient induced by mechanical stress and by measuring the capacitance change induced by electric field.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Electric Double Layer Gate Field-Effect Transistors Based on Si

Yanase

Shimada

Hasegawa

2010

Jpn. J. Appl. Phys.

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“…VDP is a dry process, which requires no solvent removal, and produces films with a uniform thickness. 14,15 As for the VDP of fluorinated PI, Maruo et al investigated the deposition of fluorinated PI produced from 6FDA and TFDB on SiO 2 /Si substrates. 16 They observed surface morphologies using several analytical instruments such as a scanning electron microscope (SEM) and an atomic force microscope (AFM) after the temperatures of the monomer sources were properly adjusted.…”

Section: Introductionmentioning

confidence: 99%

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Haruki

Oda

Wasada

et al. 2016

J of Applied Polymer Sci

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The phase appearance during the synthesis of fluorinated polyamic acid (PAA) from 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2 0 -bis(trifluoromethyl)24,4 0 -diaminobiphenyl (TFDB) in supercritical carbon dioxide (scCO 2 ) was investigated to obtain fundamental data for the deposition of fluorinate polyimides (PI) using scCO 2 . All polymerizations were carried out at 30 MPa for 60 min. The experimental temperatures ranged from 50 to 70 8C, and each of the monomer concentrations ranged from 0.67 3 10 25 to 3.3 3 10 25 mol cm 23. The holding time of the transparent phases, which was the time from the beginning of the polymerization to the appearance of a turbid phase, was increased with either a decrease in the polymerization temperature or a decrease in the initial monomer concentration. The holding time of the fluorinated PAA was longer than that of the monomers of Kapton-type PAA. The deposition of PI into the microscopic-scale trenches that had formed on the silicon wafer was successful in scCO 2 .

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“…The polyurea polymer thin films were formed by vapor deposition polymerization (VDP), which is a simple and useful dry process to form various polyimide [7], polyamide [8], or polyurea [9] thin films with a desired molecular population. We prepared two kinds of films: an aromatic polyurea film formed with 3,5-diaminobenzonic acid (DBA) and methylenedi(p-phenylene) diisocyanate (MDI) and an aliphatic polyurea film formed with DBA and hexamethylene diisocyanate (HDI).…”

Section: Introductionmentioning

confidence: 99%

Homogeneous Immobilization of Probe DNAs on DNA Chip Using Polyurea Thin Film

Kira

Kim

2009

e-J. Surf. Sci. Nanotechnol.

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We propose a method to attach probe DNAs with a homogeneous population for quantitative measurement of a minimum number of target DNA/RNA for the next generation of DNA chip. To control the homogeneous population of DNA probes, polymer films having neighboring reactive groups at the same distance, i.e., aromatic polyurea film formed with 3,5-diaminobenzonic acid (DBA) and methylenedi(p-phenylene) diisocyanate (MDI) and aliphatic polyurea film formed with DBA and hexamethylene diisocyanate (HDI), were polymerized directly on the surface of a chip substrate by vapor deposition polymerization. The spatial arrangement and homogeneity of the reactive groups on the surfaces of the substrates were examined by observing the immobilization of DNA fragments bound to 20-nm gold nano-particles on the polymer films. The results showed that physical adsorption of the DNA was effectively inhibited on the DBA/HDI film in contrast to the DBA/MDI film and the conventional aminosilane surface. Moreover, the distribution of the particles was homogeneous on the DBA/HDI film, unlike on the other surfaces. These results indicate that the aliphatic polyurea film could be used to control the selectivity and uniformity of reactive groups on the surface of substrates for more precise quantitative measurement of DNA chip technology.

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Synthesis of aromatic polyimide film by vacuum deposition polymerization

Cited by 144 publications

References 0 publications

Electric Double Layer Gate Field-Effect Transistors Based on Si

Electric Double Layer Gate Field-Effect Transistors Based on Si

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Homogeneous Immobilization of Probe DNAs on DNA Chip Using Polyurea Thin Film

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