Synthesis and morphology of Ba(Zr0.20Ti0.80)O3 powders obtained by sol–gel method

Cai, Wei; Fu, Chunlin; Chen, Huaqiang; Zhang, Qiang

doi:10.1007/s10971-010-2335-1

Cited by 20 publications

(8 citation statements)

References 30 publications

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“…BZT dengan berbagai komposisi Zr telah diteliti untuk mempelajari pengaruh kandungan Zr dalam lapisan tipis BaZr x Ti 1−x O 3 , dengan bertambahnya komposisi Zr maka dapat memperbesar parameter [5]. Penumbuhan lapisan tipis BaZr x Ti 1−x O 3 dapat dilakukan dengan berbagai cara diantaranya: sputtering [6], metal organic chemical vapour deposition atau MOCVD [7] dan metode sol gel [8]. Penggunaan metode-metode tersebut mempunyaii tujuan untuk mendapatkan lapisan tipis yang baik dan aplikatif.…”

Section: +unclassified

Kajian Variasi Temperatur Annealing dan holding time pada Penumbuhan Lapisan Tipis BaZr0,15Ti0,85O3 dengan Metode Sol-Gel

Hadiati

Ramelan

Variani

et al. 2014

JFA

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IntisariKajian ini bertujuan untuk mengetahui pengaruh variasi temperatur annealing dan holding time (waktu tahan) terhadap struktur kristal, ukuran partikel, dan ukuran butir lapisan tipis BaZr0,15Ti0,85O3. Penumbuhan lapisan tipis menggunakan metode Chemical Solution Deposition (CSD) atau Sol Gel di atas substrat Pt/Si dengan spin coater. Proses Sol Gel meliputi persiapan sol (koloid), gelation dari sol, dan penguraian pelarut. Penumbuhan lapisan tipis menggunakan variasi temperatur annealing 800 dan 900• C, dan variasi holding time 3 dan 4 jam dengan kecepatan putar 4000 rpm. Lapisan tipis dikarakterisasi dengan XRD dan dilakukan penghalusan menggunakan metode Rietveld dengan program GSAS. Ukuran partikel didapat dengan formula Scherer serta alat SEM untuk mengetahui ukuran butir. Berdasarkan hasil analisis didapatkan bahwa variasi temperatur annealing dan holding time mempengaruhi struktur kristal, ukuran partikel, dan ukuran butir lapisan tipis. Bertambahnya temperatur annealing dan holding time maka parameter kisi semakin besar dengan a = b = c yang berarti memiliki struktur kristal tertragonal. Ukuran partikel semakin besar seiring dengan bertambahnya temperatur annealing dan holding time. Namun, ukuran butir tidak berpengaruh terhadap penambahan temperatur annealing. ABSTRACTThis study purpose to determine the effect of variations of annealing temperature and holding time of the crystal structure, particle size, and grain size on BaZr0,15Ti0,85O3 thin films. Growth of BaZr0,15Ti0,85O3 thin filmsused Chemical Solution Deposition method (CSD) or Sol Gel on the substrate Pt/ Si were prepared by spin coater. These steps the preparation of CSD include sol (colloidal), gelation of the sol, and removal solvent. Growth of thin films using variation of the annealing temperature 800 and 900• CC, and variation of holding time 3 and 4 hours with a rotational speed of 4000 rpm. Thinfilmshave been made then characterized by XRD and refinement performed using the Rietveld method by the GSAS program for to determine the crystal structure. The particle size obtained by Scherer formula and SEM tool to determine the grain size. Based on the analysis it can be concluded that the variation of the annealing temperature and holding time affects the crystal structure, particle size and grain size of the BaZr0,15Ti0,85O3.thinfilm With increasing annealing temperature and holding time the greater the lattice parameters and a = b = c which means it havetertragonal crystalline structure. Particle size greater along with increasing annealing temperature and holding time. However, the annealing temperature variations for the grain size can not be determined.

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Kajian Variasi Temperatur Annealing dan holding time pada Penumbuhan Lapisan Tipis BaZr0,15Ti0,85O3 dengan Metode Sol-Gel

Hadiati

Ramelan

Variani

et al. 2014

JFA

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“…BST film can be produced using fairly simple equipment on a tight budget and in relatively short time [9][10][11]. In the film-producing process, there are a number of methods that could be used such as the metalorganic chemical vapor deposition (MOCVD) method [12][13][14], the chemical vapor deposition method [15], the sol-gel method [16][17][18][19], the atomic layer deposition (ALD) method [20], the pulsed laser ablation deposition (PLAD) method [21,22], rf sputtering [17,23,24], and chemical solution deposition (CSD) method [24][25][26][27][28][29][30][31]. The CSD method is superior as it can control the film stoichiometry with good quality, an easy procedure, and has a fairly affordable cost [32][33][34].…”

Section: Introductionmentioning

confidence: 99%

Application of Ba0.5Sr0.5TiO3 (Bst) Film Doped with 0%, 2%, 4% and 6% Concentrations of RuO2 as an Arduino Nano-Based Bad Breath Sensor

et al. 2019

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Ba0.5Sr0.5TiO3 (BST) film doped with variations in RuO2 concentration (0%, 2%, 4%, and 6%) has been successfully grown on a type-p silicon substrate (100) using the chemical solution deposition (CSD) method and spin-coating at a speed of 3000 rpm for 30 s. The film on the substrate was then heated at 850 °C for 15 h. The sensitivity of BST film + RuO2 variations as a gas sensor were characterized. The sensitivity characterization was assisted by various electronic circuitry with the purpose of producing a sensor that is very sensitive to gas. The responses from the BST film + RuO2 variation were varied, depending on the concentration of the RuO2 dope. BST film doped with 6% RuO2 had a very good response to halitosis gases; therefore, this film was applied as the Arduino-Nano-based bad-breath detecting sensor. Before it was integrated with the microcontroller, the voltage output of the BST film was amplified using an op-amp circuit to make the voltage output from the BST film readable to the microcontroller. The changes in the voltage response were then shown on the prototype display. If the voltage output was ≤12.9 mV, the display would read “bad breath”. If the voltage output >42.1 mV, the display would read “fragrant”. If 12.9 mV < voltage output ≤ 42.1 mV, the display would read “normal”.

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“…CSD method is one of the methods to create/develop thin films [2][3][4][5][6][7][8][9][10][11][12], which has advantages including the ability to control the film stoichiometry with good quality, easy procedure, require relatively low cost, and generate a good crystalline phase [13][14][15]. In addition, thin films can also be fabricated by other methods such as metal organic chemical vapor deposition (MOCVD) [16][17][18], chemical vapor deposition [19], sol-gel [20][21][22][23], atomic layer deposition (ALD) [24], metal organic decomposition (MOD) [25], pulsed laser ablation deposition (PLAD) [26,27], and RF sputtering [2,21,28].…”

Section: Introductionmentioning

confidence: 99%

Modified Spin Coating Method for Coating and Fabricating Ferroelectric Thin Films as Sensors and Solar Cells

Irzaman¹,

Syafutra²,

Siskandar³

et al. 2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

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Spin coating process with a modified spin coater is performed well, especially the second generation of modified spin coater, which has a maximum value of 18,000 rpm, is able for manufacturing/coating photonic crystal-based ferroelectric thin films that require a high angular velocity (rpm). Ferroelectric thin films that use both 3000 and 6000 rpm have given good results in energy gap, electrical conductivity, etc. In addition, the modified spin coater has also produced several applications such as sensors in the device of blood sugar level noninvasively, sensors in the automatic drying system, sensors in the robotic system, and photovoltaic cells in the system of solar cells/panels which are being developed at present. These applications used ferroelectric material such as barium strontium titanate (BST), lithium niobate (LiNbO 3 ), cuprous oxide (CuO), and lithium tantalate (LiTaO 3 ).

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Synthesis and morphology of Ba(Zr0.20Ti0.80)O3 powders obtained by sol–gel method

Cited by 20 publications

References 30 publications

Kajian Variasi Temperatur Annealing dan holding time pada Penumbuhan Lapisan Tipis BaZr0,15Ti0,85O3 dengan Metode Sol-Gel

Kajian Variasi Temperatur Annealing dan holding time pada Penumbuhan Lapisan Tipis BaZr0,15Ti0,85O3 dengan Metode Sol-Gel

Application of Ba0.5Sr0.5TiO3 (Bst) Film Doped with 0%, 2%, 4% and 6% Concentrations of RuO2 as an Arduino Nano-Based Bad Breath Sensor

Modified Spin Coating Method for Coating and Fabricating Ferroelectric Thin Films as Sensors and Solar Cells

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