“…Moreover, nanoscaled Si 3 N 4 materials, quantum dots [4][5][6], nanotubes [7], nanowires [8,9], and thin nanofilms [10] have superior photoelectric [11] and mechanical properties [12,13] for the quantum confinement effects, and therefore, the improvement in device and nanocomposite performance can be predicted [14]. Various techniques, such as catalyst-assistant synthesis of a polysilazane [15], direct nitridation process [16], amorphous silicon nitride nanopowder nitridation [17], si-containing compounds carbothermal reductionnitridation [18], chemical vapor deposition (CVD) [19], and plasma assisted chemical vapor deposition (PECVD) are used to prepare Si 3 N 4 nanomaterials. Among these available techniques, PECVD has many advantages over others.…”