Synthesis and analysis of anodic aluminum oxide-nanopore structure on Al substrates for efficient thermal management in electronic packaging

The unique optical properties of metal nitrides enhance many photoelectrical applications. In this work, a novel photodetector based on TiO2/TiN nanotubes was deposited on a porous aluminum oxide template (PAOT) for light power intensity and wavelength detection. The PAOT was fabricated by the Ni-imprinting technique through a two-step anodization method. The TiO2/TiN layers were deposited by using atomic layer deposition and magnetron sputtering, respectively. The PAOT and PAOT/TiO2/TiN were characterized by several techniques such as X-ray diffraction (XRD), scanning electron microscope (SEM), and energy dispersive X-ray (EDX). The PAOT has high-ordered hexagonal nanopores with dimensions ~ 320 nm pore diameter and ~ 61 nm interpore distance. The bandgap of PAOT/TiO2 decreased from 3.1 to 2.2 eV with enhancing absorption of visible light after deposition of TiN on the PAOT/TiO2. The PAOT/TiO2/TiN as photodetector has a responsivity (R) and detectivity (D) of 450 mAW-1 and 8.0 × 1012 Jones, respectively. Moreover, the external quantum efficiency (EQE) was 9.64% at 62.5 mW.cm−2 and 400 nm. Hence, the fabricated photodetector (PD) has a very high photoelectrical response due to hot electrons from the TiN layer, which makes it very hopeful as a broadband photodetector.

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“…The peaks observed for PAOT in Fig. 3 a agree with previous works 31 , 32 . These peaks indicate that the PAOT is polycrystalline structure.…”

Section: Resultssupporting

confidence: 90%

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Elsayed

Rabia

Shaban

et al. 2021

Sci Rep

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“…[16] This polycrystalline nature of the Al 2 O 3 template is matched with the previous literature. [17,18] This phenomenon confirms the formation of aligned perpendicular Al 2 O 3 on the Al surface due to the anodization process.…”

Section: Resultssupporting

confidence: 63%

Hexagonal Al₂O₃/TiO₂/TiN Nanotubes‐Based Sensor for CO₂ Detection

Elsayed

Shaban

Alruqi

et al. 2022

Physica Rapid Research Ltrs

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A hexagonal Al2O3/TiO2/TiN nanotube sensor is prepared using an Al2O3 template. This template is prepared through the Ni imprinting and two‐step anodization technique. After the pore widening process, the pore diameter is 300 nm. The deposition of TiO2 and TiN is conducted through atomic layer deposition and DC sputtering techniques, respectively. The application of Al2O3/TiO2/TiN nanotube sensor for the detection of CO2 gas is carried out under different flow rates of this gas from 50 to 150 SCCM. This application is carried out using electrochemical measurements (Keithley device) to determine the current–voltage and resistance time relations. From the measurements, the sensitivity of the sensor increases from 3.2% to 16.4% with increasing the concentration of the CO2 gas from 50 to 150 SCCM, respectively. Moreover, the prepared sensor has a great response time and recovery time of 3 and 35 s, respectively. This behavior qualifies the sensor for industrial applications. Moreover, the limit of detection is very small (6 SCCM). A simple mechanism is mentioned to explain the physical attraction of CO2 over the sensor surface, in which the greatly prepared tubes play the main role in enhancing the sensitivity and response percent of the sensor to CO2 gas.

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“…The improvement of the thermal management provided through the NAA coating may serve as another benefit. NAA layers can significantly reduce (~14%) the thermal resistance and junction temperature of the surface—which could be beneficial for packaging and casing design [ 251 ]. NAA membranes have shown passive cooling effect that resulted in 2.6 °C below ambient temperature of the cooler when exposed to direct sunlight [ 252 ].…”

Section: Examples Of Naa Applicationsmentioning

confidence: 99%

Recent Advances in Nanoporous Anodic Alumina: Principles, Engineering, and Applications

2021

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The development of aluminum anodization technology features many stages. With the story stretching for almost a century, rather straightforward—from current perspective—technology, raised into an iconic nanofabrication technique. The intrinsic properties of alumina porous structures constitute the vast utility in distinct fields. Nanoporous anodic alumina can be a starting point for: Templates, photonic structures, membranes, drug delivery platforms or nanoparticles, and more. Current state of the art would not be possible without decades of consecutive findings, during which, step by step, the technique was more understood. This review aims at providing an update regarding recent discoveries—improvements in the fabrication technology, a deeper understanding of the process, and a practical application of the material—providing a narrative supported with a proper background.

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Synthesis and analysis of anodic aluminum oxide-nanopore structure on Al substrates for efficient thermal management in electronic packaging

Cited by 10 publications

References 23 publications

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Hexagonal Al₂O₃/TiO₂/TiN Nanotubes‐Based Sensor for CO₂ Detection

Recent Advances in Nanoporous Anodic Alumina: Principles, Engineering, and Applications

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Synthesis and analysis of anodic aluminum oxide-nanopore structure on Al substrates for efficient thermal management in electronic packaging

Cited by 10 publications

References 23 publications

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Hexagonal Al2O3/TiO2/TiN Nanotubes‐Based Sensor for CO2 Detection

Recent Advances in Nanoporous Anodic Alumina: Principles, Engineering, and Applications

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Hexagonal Al₂O₃/TiO₂/TiN Nanotubes‐Based Sensor for CO₂ Detection