Surface Structure and Particulate Generation in Pb_0.97Nd_0.02(Zr_0.55Ti_0.45)O₃ Ablation Targets During Pulsed Laser Deposition

Abstract

A pulsed XeCl excimer laser was used to deposit amorphous Nd-modified lead zirconate titanate thin films with thicknesses between 25 and 500 nm. Atomic force microscopy was used to study the thin-film surface morphology and to determine the particulate number density (PND) on film surfaces. The dependence of the PND and the growth rate of the film on the laser-beam fluence and the density of Pb 0.97 Nd 0.02 (Zr 0.55 Ti 0.45 )O 3 targets was also studied. It was found that the PND of particulates with diameters larger than 150 nm increased with increasing laser-beam fluence and decreased with increasing target density. The surface morphology and quality of the target after ablation were studied by scanning electron microscopy. The generation of laser-cone structures and particulates at the target surface was also studied. X-ray diffraction measurements and element analyses by the energy dispersive spectroscopy of Xrays revealed the formation of extra compounds and phases at the target surface during ablation processes. Raman spectroscopy was also used to study the structure of the topmost surface layer of the target after ablation.

Magnetoelectric coupling of multiferroic chromium doped barium titanate thin film probed by magneto-impedance spectroscopy

“…Particulate formation on thin film by PLD has been explained due to laser energy density and target material. 26,27 Formation of domain pattern with labyrinthine stripes in Co/Pd film has been also captured on a 10 lm length scale by others. 28 The magnetic domains recorded in the MFM image are clearly visible in the form of alternating dark and bright contrast fringes, exhibiting strong and weak magnetic force on MFM tip.…”

Aluminum nitride deposition/characterization & pMEMs/SAW device simulation/fabrication

“…The short-range forces in PZT favor the ferroelectric phases while the long-range Coulombic forces favor the paraelectric phases. Thus, REs are commonly used to modify the material properties of PZT such as its Curie temperature, conductivity, coercitivity, and compliance [Lappalainen, 1999].…”