Aluminum nitride deposition/characterization &amp; pMEMs/SAW device simulation/fabrication

Pagán, V. R.

doi:10.33915/etd.2012

DOI: 10.33915/etd.2012

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Aluminum nitride deposition/characterization & pMEMs/SAW device simulation/fabrication

V. R. Pagán¹

Abstract: Bhattacharya. Without their valuable discussions and help in the lab, this work would have been impossible. Last, but not least, I would like to express my deep gratitude to my family and friends whose encouragement and support have been second to none.

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Aluminum nitride deposition/characterization & pMEMs/SAW device simulation/fabrication

Abstract: Bhattacharya. Without their valuable discussions and help in the lab, this work would have been impossible. Last, but not least, I would like to express my deep gratitude to my family and friends whose encouragement and support have been second to none.

Cited by 0 publications

References 36 publications

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