Surface science aspects of etching reactions

Winters, Harold F.; Coburn, J. W.

doi:10.1016/0167-5729(92)90009-z

Cited by 477 publications

(168 citation statements)

References 224 publications

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“…The most obvious of these is F atom etching, which has been reported to produce both SiF 2 and SiF 4 as etch products [26]. Another possibility is an enhancement of SiF 2 scatter (and Si etching) by ion-induced sputtering.…”

Section: Sif 2 Surface Interactions In Sif 4 Plasmasmentioning

confidence: 99%

“…In 100% SiF 4 plasmas, selective etching of Si over SiO 2 and Si 3 N 4 has been achieved [25]. Etching in these systems has been attributed to processes such as F-atom reactions with Si atoms, radical-surface reactions, and ion bombardment [26]. Adding a suitable diluent (e.g., O 2 or H 2 ), results in deposition of fluorinated silicon alloys [3].…”

Section: Fluorosilane Plasmasmentioning

confidence: 99%

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On the importance of ions and ion-molecule reactions to plasma-surface interface reactions

Williams

Martin

Fisher

2002

J. Am. Soc. Mass Spectrom.

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Section: Sif 2 Surface Interactions In Sif 4 Plasmasmentioning

confidence: 99%

Section: Fluorosilane Plasmasmentioning

confidence: 99%

On the importance of ions and ion-molecule reactions to plasma-surface interface reactions

Williams

Martin

Fisher

2002

J. Am. Soc. Mass Spectrom.

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“…So far, little attention has been paid to the interaction of the Si͑113͒ surface with halogens, which are well known to play a crucial role in wet-chemical etching reactions 12 and semiconductor processing as well as for template creation in subsequent surface functionalization with organics. With respect to chemical applications, the bulk-terminated Si͑113͒ surface exhibits two chemically different surface atoms per unit cell, i.e., one Si͑001͒-like atom with two dangling bonds and one Si͑111͒-like atom with a single unsaturated orbital.…”

Section: Introductionmentioning

confidence: 99%

Atomic structure of chlorinated Si(113) surfaces

Flege¹,

Schmidt²,

Siebert³

et al. 2008

Phys. Rev. B

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We present a detailed investigation of the adsorption of Cl on the Si͑113͒ surface based on x-ray standingwave experiments and density-functional theory calculations with additional characterization by low-energy electron diffraction and scanning tunneling microscopy. For the whole accessible range of Cl coverages, ͑2 ϫ n͒-like surface reconstructions are identified. Despite this apparent complexity, it is shown that these surface structures consist of only a few atomic adsorption geometries with the most prominent one being the Cl adsorption on top of a Si surface adatom. The required redistribution of Si concurs with a pronounced straightening and alignment of step edges along the ͓110͔ direction. Furthermore, it is argued that this adatom site plays a key role in step-edge geometries on vicinal Si͑111͒ and Si͑001͒ surfaces.

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“…Weak noticeable peaks at -0.8, -0.11, and 0.6 V and a sharp exponential rise in anodic current at 1.0 V were recorded. Observed such weak peaks may be revealed the occurrence of various surface processes [12,13]. At the above potential, it is supposed that the aniline monomer undergoes a deprotonation/ de-electronization reaction in this specified region as reported by Madhulika et al [14].…”

Section: Cyclic Voltammetrymentioning

confidence: 80%

Preparation and Characterization of Polyaniline/ZnO Composite Sensor

Mehto

Chauhan

et al. 2017

JNMR

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Polyaniline/ZnO nanocomposite thin films were prepared via an electrochemical synthesis route on ITO coated glass substrates. ZnO nanoparticles were uniformly dispersed in to the polyaniline matrix. Interaction between ZnO nanoparticle and polyaniline has been studied using X-ray diffraction (XRD), UV-Vis absorption spectroscopy, PL spectroscopy, AFM and I-V characteristics. The ammonia gas sensing behaviors of the polyaniline/ZnO composites were examined at room temperature. It was observed that the composite films showed good sensitivity, improved doping state and enhanced photoluminescence behaviour.Keywords: Polyaniline; ITO; AFM; UV-Vis absorption spectroscopy; Nanocomposites Ammonia plays very crucial role for human health. The way of natural process in animals, human and plants are responsible for production of ammonia in atmosphere. High concentrations of ammonia can cause difficulty in breathing, irritation to the eyes and skin and long term exposure of NH 3 leads to fatal [1]. There is a variety of applications of artificially synthesized ammonia in chemical industry, fertilizer factories, textile, food processing, bleaching products and refrigeration systems [2]. Therefore the human activity is a main reason for the presence of larger amount of ammonia in our atmosphere and is a necessity to detect its presence. Hence much research has been focused on the development of suitable gas sensitive materials to detect lower concentration of NH 3 with excellent performance [3].There are several studies concerning metal oxides like SnO 2 , WO 3 , ZnO, TiO 2 for NH 3 sensing applications but generally it requires a high working temperature [4,5]. There are also several conducting polymers like polythiophene, polypyrrole and polyaniline are used for detecting gases, however, the poor selectivity is the main disadvantages of pure inorganic and organic materials. New and interesting properties can be achieved by combining organic and inorganic materials [6]. Therefore conducting polymer/inorganic nanocomposites are explored as promising materials for sensing application, because of their good ability and compatibility to form chemical sensors with higher sensitivity at room temperature.Among the conducting polymers polyaniline based nanocomposites have many advantages. In literature, there are some reports available concerning the synthesis of polyaniline/ metal oxide nanocomposites in gas sensing applications. Huyen et al. [7] synthesize polyaniline/TiO 2 nanocomposites and studies the effect of TiO 2 on the sensing features. Lee et al. [8] described the effects of O 2 plasma treatment on NH3 sensing characteristics of multiwall carbon nanotube/polyaniline composite films. Wu et al. [9] reported the characterization and gas sensitivity study of polyaniline/SnO 2 hybrid material prepared by hydrothermal route. Deshpande et al. [10] reported tin oxide-intercalated polyaniline nanocomposite for ammonia gas sensing applications.We employed simple electrochemical technique to synthesize polyaniline/ZnO nanoco...

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Surface science aspects of etching reactions

Cited by 477 publications

References 224 publications

On the importance of ions and ion-molecule reactions to plasma-surface interface reactions

On the importance of ions and ion-molecule reactions to plasma-surface interface reactions

Atomic structure of chlorinated Si(113) surfaces

Preparation and Characterization of Polyaniline/ZnO Composite Sensor

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