Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine

Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric

“…For measuring the three-dimensional (3D) microstructures surfaces profile, scanning probe microscopy (SPM) is one of the most powerful tools [1,2]. The representative SPM are scanning tunneling microscopy (STM) and atomic force microscopy (AFM).…”

Nanomanufacturing—Perspective and applications

“…The angular resolution of the rotary encoder in the air spindle was 0.009 arc-seconds, enabling an AFM lateral resolution of 2 nm at 100 mm with respect to the spindle center. Note that the center of the measurement coordinate in the SPM should be aligned with that of the spindle to prevent distortions in the AFM image [68]. The spiral scanning mechanism has also been applied to a large-area STM [80].…”

Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

“…Besides, the expense and sophisticated system of these methods prevent the practical application to integrate on the manufacturing machine for on-machine measurement. Therefore, on the other hand they fall to general off-line measurement which requires the machined workpiece to be disassembled from the manufacturing machine and moved to a separated measurement room [20,21]. In this case, it blocks the proceeding of subsequent fabrication process due to the relocation error, consequently the surface form is difficult to be guaranteed and the scrap rate may increase.…”