Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric

He, Guangping; Jia, Zhigang; Ito, So; Shimizu, Yuki; Gao, Wei

doi:10.2174/1874129001408010342

Cited by 3 publications

(4 citation statements)

References 6 publications

(7 reference statements)

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“…The EFM with dual-height method showed a promising performance in profile measurement of a gold coated diffraction grating. Furthermore, in a subsequent report of our study [5], we confirmed that electrostatic force is observed also from glass sample, indicating the feasibility of applying the dual-height method to insulating materials.…”

Section: Introductionsupporting

confidence: 84%

1510 Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Goto¹,

Li²,

Jia³

et al. 2015

LEM21

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This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

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Section: Introductionsupporting

confidence: 84%

1510 Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Goto¹,

Li²,

Jia³

et al. 2015

LEM21

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show abstract

“…In the initial study, we limited the application of the SEFM to non-insulating (conductive or semiconductive) materials because the system to apply the bias voltage is similar to that of the STM, which can't obtain surface profile of insulating samples. In a subsequent report of our study (He et al, 2014), however it was confirmed that the electrostatic force was observed also on a glass sample which was clamped by an electrode. This indicated a possibility that the SEFM is applicable to insulating materials as well as metal.…”

Section: Introductionsupporting

confidence: 79%

A highly stable noncontact SPM for surface profile measurement and its application to insulating samples

Goto

Ito³

et al. 2016

JAMDSM

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A noncontact scanning electrostatic force microscope (SEFM) for surface profile measurement is introduced, and applied to the profile measurement of insulating samples. The SEFM calculates the tip-sample distance with an algorithm named 'dual-height method', and compensates for the fluctuation of the tip-sample distance to obtain accurate surface profile image. Glass and acrylic, which are commonly applied to optical components, are prepared as the insulating samples, and bias voltage is applied to the samples with an electrode clamp. On the glass sample, electrostatic force is observed in the case that the bias voltage of 50 V is on. On the acrylic sample, however, electrostatic force is not observed regardless of the bias voltage. Surface profile measurement of the glass sample is demonstrated. The tip-sample distance image is created with the dual-height method from the data of the tip trajectories and the frequency shift signals obtained through the constant tip-sample interaction scan. The results show that the tip-sample distance is kept larger than 100 nm, which is more than ten times larger than that of conventional noncontact SPMs. The large tip-sample distance brings the SEFM a high robustness against the disturbances from environment, which would cause tip-sample collision in the conventional noncontact SPMs. The same area on the same sample is measured also in an atomic force microscope (AFM) mode, which is realized by setting the bias voltage 0 V. The SEFM image agrees with the AFM image quantitatively, showing that the SEFM with the dual-height method is applicable to noncontact profile measurement of the glass. On the other hand, it is difficult to utilize the SEFM in the profile measurement of the acrylic sample because the electrostatic force on the acrylic is not controllable with the voltage of the electrode clamp.

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“…Based on the polarization intensity, the density of the polarization charge on the surface of the dielectric medium in the electric field can be calculated, and the electrostatic force between the dielectric medium and the probe is expressed as follows [20]:…”

Section: A Analysis Of Electrostatic Force On the Probementioning

confidence: 99%

“…Further, after the surface of the specimen is coated, the original properties of the specimen being measured are destroyed and cannot be restored. To address this issue, the use of an EFM system to directly measure the surface morphology of the insulating specimen with lager thickness was proposed and a series of early-stage theoretical and experimental studies were conducted; the experimental results indicated that the proposed approach was feasible to some extent [20], [21]. Based on the early-stage preliminary experiments, herein we utilized the established scanning measurement platform to perform partial measurement experiments on different non-conductive materials and different voltage-applying methods and compared the results of these measurements to the true morphology of the specimen.…”

Section: Introductionmentioning

confidence: 99%

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Meng

Tan

et al. 2018

Measurement Science Review

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A home-made electrostatic force microscopy (EFM) system is described which is directed toward assessment of the microscopic geometry of the surface of specimens made of non-conductive material with a large thickness. This system is based on the variation in the electrostatic force between the conductive probe and the non-conductive specimen in order to get its surface morphology. First, based on the principle of dielectric polarization, the variation rules of the electrostatic force between the charged probe and the non-conductive specimen were studied. Later, a special tuning fork resonant probe unit made of quartz crystal was fabricated for measurement of the electrostatic force, and the scanning probe microscopic system in the constant force mode was constructed to characterize the three-dimensional micro-topography of the surface of the specimen. Finally, this system was used to perform scanning measurement experiments on the indented surface of the specimen made of the polyvinyl chloride (PVC) material with thickness 3 mm. In the present experimental system, when the external voltage was 100 V and the distance from the probe tip to the specimen surface approximately 100 nm, the variance in the resonant frequency of the probe unit was around 0.5 Hz. These results indicate that this home-made EFM system can effectively characterize the micro-topography of the non-conductive specimen with very large thickness which is above several millimeters.

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Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric

Cited by 3 publications

References 6 publications

1510 Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

1510 Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

A highly stable noncontact SPM for surface profile measurement and its application to insulating samples

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

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