2017
DOI: 10.1016/j.cirp.2017.05.004
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Nanomanufacturing—Perspective and applications

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Cited by 128 publications
(55 citation statements)
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“…In recent years, on-machine and in-process surface metrology is playing an increasingly important role in the process chain of traditional manufacturing that is composed of cutting, grinding and polishing for precision workpieces with complex shapes and/or extremely tight tolerances, such as freeform optics in head-up displays, large roll moulds for roll-to-roll replication and turbine blades of airplanes [220] [108] [27]. Similar trends are observed in the non-traditional manufacturing processes, such as additive manufacturing [199] and nano-scale manufacturing [55] [54].…”
Section: Introductionmentioning
confidence: 88%
“…In recent years, on-machine and in-process surface metrology is playing an increasingly important role in the process chain of traditional manufacturing that is composed of cutting, grinding and polishing for precision workpieces with complex shapes and/or extremely tight tolerances, such as freeform optics in head-up displays, large roll moulds for roll-to-roll replication and turbine blades of airplanes [220] [108] [27]. Similar trends are observed in the non-traditional manufacturing processes, such as additive manufacturing [199] and nano-scale manufacturing [55] [54].…”
Section: Introductionmentioning
confidence: 88%
“…Indeed, traditional top-down or bottom-up chemical and physical nanomanufacturing approaches have a greater energy-intensity compared to manufacturing processes of bulk materials. Further, they are often characterized by low process yields (using acidic/basic chemicals and organic solvents), generation of greenhouse gases, and they require specific facilities, operative conditions (e.g., from moderate to high vacuum), and high purity levels of starting materials [2][3][4]. The principles of green chemistry ("the invention, design and application of chemical products and processes to reduce or to eliminate the use and generation of hazardous substances") combined with white biotechnology ("biotechnology that uses living cells-yeasts, molds, bacteria, plants, and enzymes to synthesize products at industrial scale") can really contribute to the development of more sustainable industrial processes [5], also for nanomanufacturing.…”
Section: Introductionmentioning
confidence: 99%
“…Nano-metrology is the only effective method that ensures the reliability and consistency of nano-manufacturing [1][2][3]. Compared with other techniques such as scanning electron microscopy (SEM), atomic force microscopy (AFM) [4], and near-field scanning optical microscope (NSOM) [5], optical scatterometry [6,7], also known as optical critical dimension metrology or optical critical dimension (OCD) metrology, is more suitable for monitoring, assessing, and optimizing the nano-manufacturing processes due to its advantages of being non-contact, non-destructive, low in cost, and easy to integrate, etc.…”
Section: Introductionmentioning
confidence: 99%