2019
DOI: 10.1016/j.cirp.2019.05.005
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On-machine and in-process surface metrology for precision manufacturing

Abstract: On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on cal… Show more

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Cited by 300 publications
(140 citation statements)
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“…Stylus instrument, also known as surface profilometer, is used as a contact‐type surface roughness measurement of the machined component. It consists of a diamond stylus probe that is moved perpendicularly to the direction of roughness, and a characteristic of surface roughness is recorded at the other ends . It is most widely used technique because of its advantages and generating a profile of an object along a well‐defined direction .…”
Section: Methodsmentioning
confidence: 99%
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“…Stylus instrument, also known as surface profilometer, is used as a contact‐type surface roughness measurement of the machined component. It consists of a diamond stylus probe that is moved perpendicularly to the direction of roughness, and a characteristic of surface roughness is recorded at the other ends . It is most widely used technique because of its advantages and generating a profile of an object along a well‐defined direction .…”
Section: Methodsmentioning
confidence: 99%
“…[10][11][12] Contact-type measurements are currently used due to the compact design, high measurement accuracy, and the ability to deliver consistent output for surface inspection. 13 However, the study did not provide universal testimony for the significance of these advantages for the accuracy of measurements. 14 Extensive research is carried out on non-contact-type assessment of surface roughness parameters using machine vision system and artificial intelligence technology, which include methods such as laser speckle, light scattering, and optical interference.…”
mentioning
confidence: 89%
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“…As a result, the surface error “copied” from the motion error is not detectable through the probe with the same motion error. Therefore, calibration [ 195,196 ] or separation [ 197,198 ] of the motion error is indispensable. The on‐machine measurement is thus significantly different from the off‐machine measurement as shown in Figure a.…”
Section: Single‐point‐probe‐based Profilometrymentioning
confidence: 99%